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Methods of forming thermo-mechanical sensor

  • US 6,171,879 B1
  • Filed: 12/29/1998
  • Issued: 01/09/2001
  • Est. Priority Date: 10/24/1997
  • Status: Expired due to Term
First Claim
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1. A method of forming an integrated sensor for sensing a temperature variation, the method comprising the steps of:

  • forming a switch detecting circuit region; and

    forming a sensor switching region connected to and positioned adjacent the switch detecting circuit region, the sensor switching region being formed by;

    forming a first conducting layer of material on a support so as to define a fixed contact layer, forming a sacrificial layer on the first conducting layer, forming a second conducting layer on the sacrificial layer; and

    forming a third conducting layer on the second conducting layer, the second conducting layer having a different thermal expansion coefficient than the first conducting layer, and wherein the first and second conducting layers define a floating contact.

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