Charged particle beam irradiation apparatus
First Claim
1. A charged particle beam irradiation apparatus, comprisingan irradiating device configured to irradiate a sample with a charged particle beam;
- and a reflection prevention board configured to prevent the sample from being re-irradiated with reflected particles and/or secondary particles, the reflection prevention board comprising a laminated sheet of a plurality of thin films and a plurality of microholes through the laminated sheet, the microholes being formed in an inclined relation to the reflection prevention board.
2 Assignments
0 Petitions
Accused Products
Abstract
A reflection prevention board of a charged particle beam irradiation apparatus of the present invention comprises a laminate sheet having a plurality of thin films and a plurality of microholes through the laminate sheet. According to the present invention the reflection prevention board can be manufactured at a lower cost, the reason being that it is easier to form microholes in the thin films and then laminate these thin films in an aligned relation than to drill holes through a thicker sheet. By doing so it is possible to achieve a better yield. Further, much deeper microholes, which might not otherwise be achieved on a thick sheet, can be formed by using more thin films and a reflection prevention effect can be improved by doing so.
-
Citations
15 Claims
-
1. A charged particle beam irradiation apparatus, comprising
an irradiating device configured to irradiate a sample with a charged particle beam; - and
a reflection prevention board configured to prevent the sample from being re-irradiated with reflected particles and/or secondary particles, the reflection prevention board comprising a laminated sheet of a plurality of thin films and a plurality of microholes through the laminated sheet, the microholes being formed in an inclined relation to the reflection prevention board. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
the reflection prevention board is arranged on a sample side of the objective lens and/or under the sample.
- and
-
9. A charged particle beam irradiation apparatus comprising:
-
irradiating means for irradiating a sample with a charged particle beam; and
a reflection prevention board having a plurality of microholes, for preventing the sample which is irradiated with the charged particle beam from being re-irradiated with reflected particles/secondary particles, these microholes being inclined with respect to the reflection prevention board. - View Dependent Claims (10, 11, 12, 13, 14)
-
-
15. A charged particle beam irradiation apparatus comprising:
-
irradiation means for irradiating a sample with a charged particle beam; and
a reflection prevention board for preventing the sample from being re-irradiated with reflected particles and/or secondary particles, the reflection prevention board comprising a laminated sheet of a plurality of thin films in contact with each other and a plurality of microholes extending continuously through the laminated sheet.
-
Specification