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Charged particle beam irradiation apparatus

  • US 6,172,364 B1
  • Filed: 07/20/1998
  • Issued: 01/09/2001
  • Est. Priority Date: 07/29/1997
  • Status: Expired due to Term
First Claim
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1. A charged particle beam irradiation apparatus, comprisingan irradiating device configured to irradiate a sample with a charged particle beam;

  • and a reflection prevention board configured to prevent the sample from being re-irradiated with reflected particles and/or secondary particles, the reflection prevention board comprising a laminated sheet of a plurality of thin films and a plurality of microholes through the laminated sheet, the microholes being formed in an inclined relation to the reflection prevention board.

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