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Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

  • US 6,172,797 B1
  • Filed: 11/09/1999
  • Issued: 01/09/2001
  • Est. Priority Date: 06/19/1995
  • Status: Expired due to Term
First Claim
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1. A spatial light modulator comprising:

  • an optically transmissive substrate having an upper surface and a lower surface;

    a deflectable element attached to the lower surface of the optically transmissive substrate, the deflectable element comprising a first portion and a second portion such that during a deflection of the deflectable element, the second portion moves towards the lower surface as the first portion moves away from the lower surface, and the deflection is limited by contact between the second portion and the lower surface; and

    a circuit substrate positioned below and spaced apart from the lower surface of the optically transmissive substrate.

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