Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
First Claim
Patent Images
1. A spatial light modulator comprising:
- an optically transmissive substrate having an upper surface and a lower surface;
a deflectable element attached to the lower surface of the optically transmissive substrate, the deflectable element comprising a first portion and a second portion such that during a deflection of the deflectable element, the second portion moves towards the lower surface as the first portion moves away from the lower surface, and the deflection is limited by contact between the second portion and the lower surface; and
a circuit substrate positioned below and spaced apart from the lower surface of the optically transmissive substrate.
3 Assignments
0 Petitions
Accused Products
Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
-
Citations
61 Claims
-
1. A spatial light modulator comprising:
-
an optically transmissive substrate having an upper surface and a lower surface;
a deflectable element attached to the lower surface of the optically transmissive substrate, the deflectable element comprising a first portion and a second portion such that during a deflection of the deflectable element, the second portion moves towards the lower surface as the first portion moves away from the lower surface, and the deflection is limited by contact between the second portion and the lower surface; and
a circuit substrate positioned below and spaced apart from the lower surface of the optically transmissive substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
wherein the deflectable element is configured to move from a non-deflected position to a deflected position; and
wherein a portion of the deflectable element reflects light from an optical source to imaging optics when the deflectable element is in the deflected position, the optical source and the imaging optics both located on the same side of the optically transmissive substrate.
-
-
34. The spatial light modulator of claim 33:
-
wherein the deflectable element is configured to move from the non-deflected position to a second deflected position; and
wherein a portion of the deflectable element reflects light from the optical source to second imaging optics when the deflectable element is in the second deflected position, the optical source and the second imaging optics both located on the same side of the optically transmissive substrate.
-
-
35. The spatial light modulator of claim 1:
-
wherein the deflectable element is configured to move from a non-deflected position to a deflected position; and
wherein a portion of the deflectable element reflects light from an optical source to imaging optics when the deflectable element is in the non-deflected position, the optical source and the imaging optics both located on the same side of the optically transmissive substrate.
-
-
36. The spatial light modulator of claim 35:
-
wherein the deflectable element is configured to move from the non-deflected position to a second deflected position; and
wherein a portion of the deflectable element reflects light from the optical source to second imaging optics when the deflectable element is in the second deflected position, the optical source and the second imaging optics both located on the same side of the optically transmissive substrate.
-
-
37. The spatial light modulator of claim 1, wherein the second portion is narrower than, and extends from, the first portion.
-
38. The spatial light modulator of claim 1 wherein the shape of the second portion minimiizes a contact area between the second portion and the optically transmissive substrate.
-
39. The spatial light modulator of claim 1, wherein the second portion comprises a sharp contact tip configured to contact the optically transmissive substrate when the deflectable element is at a maximum deflection.
-
40. The spatial light modulator of claim 1, wherein the second portion is coplanar with the first portion.
-
41. The spatial light modulator of claim 1, wherein the second portion and the lower surface are electrically connected.
-
42. The spatial light modulator of claim 1, further comprising a voltage source configured to assert a voltage bias to the deflectable element.
-
43. The spatial light modulator of claim 1, wherein the spatial light modulator is a portion of an array of spatial light modulators.
-
44. The spatial light modulator of claim 1 further comprising a plurality of reflective deflectable elements each having configurations similar to the deflectable element, wherein selected deflectable elements in the plurality of reflective deflectable elements are grouped in a plurality of subsets, each subset oriented so as to selectively direct incident light at a specific angle.
-
45. The spatial light modulator of claim 1 further comprising:
a second deflectable element attached to the lower surface of the optically transmissive substrate, the second deflectable element comprising a third portion and a fourth portion such that during a deflection of the second deflectable element, the fourth portion moves towards the lower surface as the third portion moves away from the lower surface, and the deflection of the second deflectable element is limited by contact between the fourth portion and the lower surface.
-
46. The spatial light modulator of claim 45 wherein the deflectable element and the second deflectable element are configured such that each have essentially the same deflection angle when the second portion and the fourth portion contact the lower surface.
-
47. A process for directing light comprising:
-
providing an optically transmissive substrate having a surface;
providing a substantially rigid deflectable element connected to the substrate surface, wherein the deflectable element includes a first portion, a second portion, and a reflective surface, and wherein the deflectable element is configured to be positioned in an undeflected state and in a deflected state, and the second portion moves towards, and can eventually contact, the substrate surface as the first portion moves away from the substrate surface;
positioning the deflectable element in the undeflected state;
shining a light beam from a light source through the substrate onto the reflective surface so that the light beam is reflected through the substrate in a first direction when the deflectable element is in the undeflected state; and
positioning the deflectable element in the deflected state so that the light beam is reflected through the substrate in a second direction when the deflectable element is in the deflected state. - View Dependent Claims (48, 49, 50)
providing a circuit substrate below and spaced apart from the optically transmissive substrate;
wherein positioning the deflectable element in the deflected state is done by creating a first electric potential difference between the deflectable element and the circuit substrate, and the deflectable element remains in the deflected state until a second electric potential difference, less than the first electric potential difference, exists between the deflectable element and the circuit substrate.
-
-
51. A spatial light modulator fabrication process comprising:
-
forming a sacrificial layer over an optically transmissive substrate;
forming a hole through said sacrificial layer;
forming and patterning a support layer over said sacrificial layer to define a deflectable element, said deflectable element having a first portion and a second portion such that during a deflection of said deflectable element, said second portion moves toward said substrate as said first portion moves away from said substrate, and said deflection is limited by contact between said second portion and said substrate;
forming and patterning a hinge layer over a portion of said deflectable element to define a hinge such that a portion of said hinge extends through said hole and attaches said deflectable element to said substrate; and
removing said sacrificial layer so that said deflectable element may deflect. - View Dependent Claims (52, 53, 54)
removing a portion of said sacrificial layer to expose a portion of said hinge layer extending through said hole; and
forming a conductive and reflective layer over said deflectable element such that said deflectable element is electrically coupled to a second deflectable element.
-
-
54. The process of claim 51 further comprising:
patterning said substrate to define a raised portion such that said deflection is limited by contact between said raised portion and said second portion.
-
55. A spatial light modulator fabrication process comprising:
-
forming a first sacrificial layer over an optically transmissive substrate;
forming and patterning a support layer over said first sacrificial layer to define a deflectable element having a first portion and a second portion and to create an exposed portion of said first sacrificial layer, wherein during a deflection of said deflectable element, said second portion moves toward said substrate as said first portion moves away from said substrate, and said deflection is limited by contact between said second portion and said substrate;
forming a second sacrificial layer over the exposed portion of said first sacrificial layer and over said deflectable element;
forming a first hole through said second sacrificial layer and positioned over said deflectable element, and a second hole through both said first sacrificial layer and said second sacrificial layer and positioned away from said deflectable element;
forming and patterning a hinge layer to define a hinge such that a first portion of said hinge extends through said first hole and is coupled with said deflectable element, and such that a second portion of said hinge extends through said second hole and is coupled with said substrate so as to attach said deflectable element to said substrate; and
removing said first sacrificial layer and said second sacrificial layer.
-
-
56. A process for the fabrication of a spatial light modulator, the process comprising:
-
depositing a sacrificial layer over an optically transmissive substrate;
etching a hole through the sacrificial layer;
depositing a reflective layer over the sacrificial layer;
patterning the reflective layer to define a deflectable element, the deflectable element having a first portion and a second portion such that during a deflection of the deflectable element, the second portion moves toward the optically transmissive substrate as the first portion moves away from the optically transmissive substrate, and the deflection is limited by contact between the second portion and the optically transmissive substrate;
connecting the deflectable element to the optically transmissive substrate through the hole;
removing the sacrificial layer so that the deflectable element is free to deflect;
forming addressing circuitry including an electrode on a circuit substrate; and
aligning and joining the optically transmissive substrate and the circuit substrate such that the deflectable element can be selectively deflected by an electric potential applied to the electrode. - View Dependent Claims (57, 58, 59, 60, 61)
depositing an aperture layer on the optically transmissive substrate before depositing the sacrificial layer; and
patterning the aperture layer to allow light to pass only through a portion of the optically transmissive substrate.
-
-
58. The process of claim 56, wherein removing the sacrificial layer comprises etching the sacrificial layer with a XeF2 gas phase etch.
-
59. The process of claim 56, wherein depositing the reflective layer comprises:
-
depositing a first dielectric layer of a first index of refraction; and
depositing a second dielectric layer of a second index of refraction different from the first index of refraction.
-
-
60. The process of claim 56 wherein depositing and patterning the reflective layer comprises:
-
depositing an optically transmissive layer;
patterning the optically transmissive layer; and
depositing a conductive material on the second portion such that the conductive material does not contact the optically transmissive substrate when the second portion contacts the optically transmissive substrate.
-
-
61. The process of claim 60, wherein depositing a conductive material comprises depositing the conductive material in a direction, wherein the direction includes a component direction oriented from the first portion towards the second portion of the deflectable element.
Specification