Process for making integrated laser/modulators
First Claim
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1. A semiconductor laser and modulator integrated on a first side of a semiconductor opposite a single semiconductor foundation substrate side of said semiconductor, operating with reduced wavelength chirping, comprising:
- semiconductor laser means for producing laser light deposited on said first side;
wavelength-selective grating means for selecting a specific wavelength of said laser light deposited on said first side;
semiconductor modulating means having a determinable width for modulating said selected laser light deposited on said first side; and
means for isolating said selected and modulated wavelength of light from said laser and modulating means, said isolating means further comprising a window region having an optimum length to permit tolerable reflectivity, said window region having a width wider than that of said modulating means, and an anti-reflective coating disposed on an end section of said isolating means;
said laser means, modulating means, wavelength-selective grating means and isolating means all disposed on said first side to form an integrated semiconductor circuit.
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Abstract
An integrated laser/modulator (“ILM”) operating with reduced chirping is formed on a single semiconductor substrate. A reduction in chirping and any resultant wavelength dispersion is realized by precisely controlling the length of a window region incorporated in the ILM in order to isolate the ILM'"'"'s active regions from any residual reflections.
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Citations
11 Claims
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1. A semiconductor laser and modulator integrated on a first side of a semiconductor opposite a single semiconductor foundation substrate side of said semiconductor, operating with reduced wavelength chirping, comprising:
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semiconductor laser means for producing laser light deposited on said first side;
wavelength-selective grating means for selecting a specific wavelength of said laser light deposited on said first side;
semiconductor modulating means having a determinable width for modulating said selected laser light deposited on said first side; and
means for isolating said selected and modulated wavelength of light from said laser and modulating means, said isolating means further comprising a window region having an optimum length to permit tolerable reflectivity, said window region having a width wider than that of said modulating means, and an anti-reflective coating disposed on an end section of said isolating means;
said laser means, modulating means, wavelength-selective grating means and isolating means all disposed on said first side to form an integrated semiconductor circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification