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Two speed air cylinder for slit valve motion control

  • US 6,173,938 B1
  • Filed: 09/22/1998
  • Issued: 01/16/2001
  • Est. Priority Date: 09/22/1998
  • Status: Expired due to Fees
First Claim
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1. A semiconductor processing system comprising:

  • a) a transfer chamber having an aperture formed therein to provide access to a semiconductor processing chamber disposed adjacent the transfer chamber;

    b) a door adapted to substantially cover the aperture; and

    c) a staged variable speed pneumatic cylinder coupled to the door, wherein the pneumatic cylinder comprises;

    i) a front primary channel at a front end of the pneumatic cylinder and a back primary channel at a back end of the pneumatic cylinder;

    ii) a front auxiliary channel at the front end having a smaller cross sectional area than that of the front primary channel and a back auxiliary channel at the back end of the pneumatic cylinder having a cross sectional area smaller than that of the back primary channel;

    iii) a front bridging conduit connecting the front primary channel to the front auxiliary channel and a back bridging conduit connecting the back primary channel to the back auxiliary channel;

    iv) a front recess fluidly connected to the front primary channel and a back recess fluidly connected to the back primary channel; and

    v) a front sealing element attached on a front piston face and adapted to be received by the front recess and a back sealing element attached on a back piston face and adapted to be received by the back recess.

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