Method of forming trench isolation region for semiconductor device

• US 6,174,785 B1
• Filed: 06/18/1998
• Issued: 01/16/2001
• Est. Priority Date: 04/09/1998
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Li, Li, Parekh, Kunal R.
• Primary Examiner(s): DANG, TRUNG Q
• Application Number:
  US09/099,274
• Time in Patent Office: 943 Days
• Field of Search: 438/424, 438/435, 438/437, 148/DIG.50
• US Class Current: 438/424
• CPC Class Codes: H01L 21/76232 of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls H01L21/76229 takes precedence
• CPC Class Codes: Y10S 148/05 Etch and refill

Abstract

Shallow trench isolation regions in a semiconductor device are formed by utilizing sacrificial spacers such as polysilicon spacers having a rounded shape to form trench isolation areas. The spacer shape is transferred into a semiconductor substrate during an etching process to define the profile of the trench, resulting in a trench with substantially rounded upper and lower corners in the substrate. An oxide filler material is deposited in the trench and over the substrate to form a covering layer. The covering layer is then polished back to form a filled trench region which electrically isolates active areas in the substrate. The polishing step can be performed by a blanket dry etching procedure, or by a combination of chemical/mechanical planarization and wet etching. The rounded shape of the trench improves the electrical characteristics of the trench such that current leakage is decreased, and also provides a more optimized trench profile for filling the trench with the filler material.

Claims

1. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a semiconductor substrate with a stack structure formed thereon, the stack structure including a pad oxide layer formed over the semiconductor and beneath a layer of oxides of silicon;

forming a vertical slot with a pair of sidewalls in the stack structure, the slot having a first width between the sidewalls;

forming spacers along the sidewalls of the slot; and

forming a trench in the substrate below the slot while simultaneously removing the spacers, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a rounded profile adjacent to the sidewalls of the slot.

2. The method of claim 1, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof.

3. The method of claim 1, wherein the stack structure further comprises a nitride layer formed over the pad oxide layer.

4. The method of claim 1, wherein the vertical slot is formed by etching a patterned photoresist layer on the stack structure.

5. The method of claim 1, wherein the spacers are formed by an anisotropic etching process.

6. The method of claim 1, wherein the spacers are formed from a material selected from the group consisting of polysilicon, oxides of silicon or polysilicon which are doped or undoped, silicon nitride, parylene, and photoresist polymers.

7. The method of claim 1, wherein the trench is formed by an anisotropic etching process.

8. The method of claim 1, wherein the trench is formed such that the shape of the spacers is transferred into the trench, thereby forming a trench with a substantially rounded V-shaped or U-shaped profile.

9. The method of claim 1, further comprising forming an oxide liner on the trench surface.

10. The method of claim 1, further comprising depositing an oxide filler material in the trench and over the stack structure to form a covering layer.

11. The method of claim 10, wherein oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

12. The method of claim 10, further comprising polishing the covering layer and the stack structure to form a filled trench region by a process selected from the group consisting of blanket dry etching, and a combination of chemical/mechanical planarization and wet etching.

13. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a layer of oxides of silicon, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure, the slot having a first width between the sidewalls;

depositing a polysilicon layer over the stack structure and the vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot; and

etching a trench in the substrate below the slot while simultaneously removing the spacers such that the shape of the spacers is transferred into the trench, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile.

14. The method of claim 13, wherein the spacers are formed by an anisotropic etching process.

15. The method of claim 14, wherein the trench is formed by the same anisotropic etching process that forms the spacers.

16. The method of claim 13, further comprising forming an oxide liner on the trench surface.

17. The method of claim 13, further comprising depositing an oxide filler material in the trench and over the stack structure to form a covering layer.

18. The method of claim 17, wherein the oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

19. The method of claim 17, further comprising polishing the covering layer and the stack structure to form a filled trench region by a process selected from the group consisting of blanket dry etching, and a combination of chemical/mechanical planarization and wet etching.

20. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a pad oxide layer formed over the substrate, a silicon nitride layer formed over the pad oxide layer, and a layer of oxides of silicon formed over the silicon nitride layer, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure, the slot having a first width between the sidewalls;

depositing a polysilicon layer over the stack structure and the vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot; and

etching a trench in the substrate below the slot while simultaneously removing the spacers such that the shape of the spacers is transferred into the trench, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile.

21. The method of claim 20, wherein the spacers are formed by an anisotropic etching process.

22. The method of claim 21, wherein the trench is formed by the same anisotropic etching process that forms the spacers.

23. The method of claim 20, further comprising forming an oxide liner on the trench surface.

24. The method of claim 20, further comprising depositing an oxide filler material in the trench and over the stack structure to form a covering layer.

25. The method of claim 24, wherein the oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

26. The method of claim 24, further comprising the step of polishing the covering layer and the stack structure to form a filled trench region by a process selected from the group consisting of blanket dry etching, and a combination of chemical/mechanical planarization and wet etching.

27. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a layer of oxides of silicon, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure;

depositing a polysilicon layer over the stack structure and vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot;

etching a trench in the substrate below the slot while simultaneously removing the spacers, the trench defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile;

depositing an oxide filler material in the trench and over the stack structure to form a covering layer; and

polishing the covering layer and the stack structure to form a filled trench region which electrically isolates active areas in the substrate.

28. The method of claim 27, wherein the spacers are formed by an anisotropic etching process.

29. The method of claim 28, wherein the trench is formed by the same anisotropic etching process that forms the spacers.

30. The method of claim 27, further comprising forming an oxide liner on the trench surface.

31. The method of claim 27, wherein the polishing is performed by a process selected from the group consisting of blanket dry etching, and a combination of chemical/mechanical planarization and wet etching.

32. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a pad oxide layer formed over the substrate, a silicon nitride layer formed over the pad oxide layer, and a layer of oxides of silicon formed over the silicon nitride layer, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure;

depositing a polysilicon layer over the stack structure and vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot;

etching a trench in the substrate below the slot while simultaneously removing the spacers, the trench defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile;

forming an oxide liner on a surface of the trench;

depositing an oxide filler material in the trench and over the stack structure to form a covering layer; and

polishing the covering layer and the stack structure to form a filled trench region which electrically isolates active areas in the substrate.

33. The method of claim 32, wherein the spacers are formed by an anisotropic etching process.

34. The method of claim 33, wherein the trench is formed by the same anisotropic etching process that forms the spacers.

35. The method of claim 32, wherein the polishing comprises performing chemical/mechanical planarization to remove the covering layer and stack structure down to the silicon nitride layer, and then performing a wet etch to remove the silicon nitride layer and pad oxide layer.

36. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a semiconductor substrate with a stack structure formed thereon;

forming a vertical slot with a pair of sidewalls in the stack structure, the slot having a first width between the sidewalls;

forming spacers along the sidewalls of the slot;

forming a trench in the substrate below the slot while simultaneously removing the spacers, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a rounded profile adjacent to the sidewalls of the slot; and

depositing an oxide filler material in the trench and over the stack structure to form a covering layer, wherein the oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

37. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a layer of oxides of silicon;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure, the slot having a first width between the sidewalls;

depositing a polysilicon layer over the stack structure and the vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot;

etching a trench in the substrate below the slot while simultaneously removing the spacers such that the shape of the spacers is transferred into the trench, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile; and

depositing an oxide filler material in the trench and over the stack structure to form a covering layer, wherein the oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

38. The method of claim 37, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof.

39. A method of forming a trench isolation region in a semiconductor device, the method comprising:

providing a silicon substrate with a stack structure formed thereon comprising a pad oxide layer formed over the substrate, a silicon nitride layer formed over the pad oxide layer, and a layer of oxides of silicon formed over the silicon nitride layer;

forming a vertical slot with sidewalls in the stack structure from a patterned photoresist layer on the stack structure, the slot having a first width between the sidewalls;

depositing a polysilicon layer over the stack structure and the vertical slot;

etching the polysilicon layer to form polysilicon spacers with a curved shape along the sidewalls of the slot;

etching a trench in the substrate below the slot while simultaneously removing the spacers such that the shape of the spacers is transferred into the trench, the trench having a second width which is less than the first width of the slot, the trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile; and

depositing an oxide filler material in the trench and over the stack structure to form a covering layer, wherein the oxide filler material is formed from a high density plasma oxide comprising tetra ethyl orthosilicate.

40. The method as defined in claim 39, wherein the layer of oxides of silicon is composed of silicon dioxide formed by a decomposition of a material selected from the group consisting of tetra ethyl orthosilicate, low silane oxide, and combinations thereof.

41. A method of forming a trench isolation structure formed in a semiconductor device, the method comprising:

providing a semiconductor substrate having an upper surface;

forming a plurality of trenches in the semiconductor substrate, each said trench;

being defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls;

having a pair of upper corners with a convex profile; and

having the upper corners thereof joining the sidewalls thereof with the upper surface of the semiconductor substrate;

forming a plurality of islands, each said island being situated upon the upper surface of the semiconductor substrate between two trenches of said plurality of trenches and comprising;

a first dielectric layer upon the upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

third dielectric layer having a composition different than and being situated upon the second dielectric layer;

forming a fourth dielectric layer having a composition different than the second dielectric layer, having a top planar surface being situated upon said plurality of islands, and filling said plurality of trenches.

42. The method of claim 41, wherein each said trench has a rounded V-shaped or U-shaped profile.

43. The method of claim 41, further comprising forming an oxide liner layer on the surface of each said trench.

44. The method of claim 41, wherein each of the first, third, and fourth dielectric layers are composed of an oxide of silicon, and the second dielectric layer is composed of a nitride of silicon.

45. A method of forming a trench isolation structure formed in a semiconductor device, the method comprising:

providing a semiconductor substrate having an upper surface;

forming a plurality of trenches in the semiconductor substrate, each said trench;

being defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls;

having a pair of lower corners with a concave profile; and

having the lower corners thereof joining the sidewalls with the bottom wall thereof;

forming a plurality of islands, each said island being situated upon the upper surface of the semiconductor substrate between two trenches of said plurality of trenches and comprising;

a first dielectric layer upon the upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a composition different than and being situated upon the second dielectric layer;

a fourth dielectric layer having a composition different than the second dielectric layer, having a top planar surface, being situated upon said plurality of islands, and filling said plurality of trenches.

46. The method of claim 45, wherein each said trench has a rounded V-shaped or U-shaped profile.

47. The method of claim 45, further comprising forming an oxide liner layer on the surface of each said trench.

48. The method of claim 45, wherein each of the first, third and fourth dielectric layers are composed of an oxide of silicon, and the second dielectric layer is composed of a nitride of silicon.

49. A method of forming a trench isolation structure for electrically isolating active areas in a semiconductor device, the method comprising:

providing a semiconductor substrate having a planar upper surface;

forming a plurality of trenches in the semiconductor substrate, each said trench;

being defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls;

having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile;

having the upper corners thereof joining the sidewalls thereof with the upper surface of the semiconductor substrate; and

having the lower corners thereof joining the sidewalls with the bottom wall thereof;

forming a plurality of islands, each said island being situated upon the planar upper surface of the semiconductor substrate between two trenches of said plurality of trenches and comprising;

a first dielectric layer upon the upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a composition different than and being situated upon the second dielectric layer;

forming a fourth dielectric layer having a composition different than the second dielectric layer, having a top planar surface, being situated upon said plurality of islands, and filling said plurality of trenches.

50. The method of claim 49, wherein each said trench has a rounded V-shaped or U-shaped profile.

51. A method of forming a semiconductor device having trench isolation structures for electrically isolating active areas in the semiconductor device, the method comprising:

providing a semiconductor substrate having a planar upper surface;

forming a plurality of trenches in the semiconductor substrate, each said trench being defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls, each said trench having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile, the upper corners of each trench joining the sidewalls of the trench with the upper surface of the semiconductor substrate, and the lower corners of each trench joining the sidewalls with the bottom wall of the trench;

forming a plurality of islands, each said island being situated upon the planar upper surface of the semiconductor substrate between two trenches of said plurality of trenches and comprising;

a first dielectric layer upon the upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a composition different than and being situated upon the second dielectric layer;

forming an oxide filler material in each trench, upon each island, and having a top planar surface over each said trench that is above the planar upper surface of the semiconductor substrate.

52. A method of forming an isolation structure, the method comprising:

providing a semiconductor substrate having a plurality of active areas therein;

forming a plurality of trenches in the semiconductor substrate, each said trench;

being in between a pair of active areas and defined by a pair of sidewalls and a bottom wall that is perpendicular to the sidewalls;

having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile; and

having an oxide liner on a surface thereof;

forming a plurality of islands, each said island being situated upon a planar upper surface of the semiconductor substrate between two trenches of said plurality of trenches and comprising;

a first dielectric layer upon the planar upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a composition different than and being situated upon the second dielectric layer;

forming a covering layer, composed of an electrically insulative material, filling each said trench, covering each said island, and having a planar top surface, wherein each said trench electrically isolates a respective pair of said active areas.

53. The method as defined in claim 52, wherein:

each pair of adjacent islands are separated by a first width therebetween;

each said trench has a second width which is less than the first width; and

each said trench has a pair of upper corners with a rounded profile intersecting the planar upper surface of the semiconductor substrate and adjacent to a respective pair of islands.

54. The method as defined in claim 52, wherein:

each said first dielectric layer is a pad oxide layer formed over the semiconductor substrate;

each said second dielectric layer is a silicon nitride layer formed over the pad oxide layer; and

each said third dielectric layer is a layer of oxide of silicon formed over the silicon nitride layer.

55. A method for forming an isolation structure, the method comprising:

providing a semiconductor substrate;

forming a plurality of trenches in the semiconductor substrate each having a width, a pair of convex profiled upper corners, and a pair of concave profiled lower corners;

forming a plurality of islands each;

being situated between two of said trenches;

being separated from a respective adjacent island by a distance that is greater than the width of each said trench; and

comprising;

a first dielectric layer upon the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a composition different than and being situated upon the second dielectric layer;

forming an electrically insulative layer filling each said trench, contacting each said island, and having a planar top surface.

56. A method for forming an isolation structure, the method comprising:

providing a semiconductor substrate having a planar upper surface and a plurality of active areas therein;

forming a plurality of trenches in the semiconductor substrate, each said trench;

being in between a respective pair of active areas and defined by a pair of sidewalls with a width therebetween and a bottom wall that is perpendicular to said sidewalls;

having a pair of upper corners with a convex profile and a pair of lower corners with a concave profile; and

having an oxide liner on a surface thereof;

forming a plurality of islands, each said island being situated upon the planar upper surface of the semiconductor substrate between two respective trenches of said plurality of trenches and being separated from a respective adjacent island by a distance that is greater than the width between the sidewalls of each said trench, each said island comprising;

a first dielectric layer upon the planar upper surface of the semiconductor substrate;

a second dielectric layer having a composition different than the first dielectric layer and being situated upon the first dielectric layer; and

a third dielectric layer having a planar top surface and having a composition different than and being situated upon the second dielectric layer;

forming a covering layer, composed of an electrically insulative material, filling each said trench, covering each said island, and having a planar top surface, wherein each said trench electrically isolates the respective pair of active areas that the trench is between.