Micromachined inductive sensor having capacitively decoupled coils
First Claim
1. A micromachined inductive sensor for detecting, without contact and through the intermediary of a radiated alternating magnetic field, the position and/or the movement of an object capable of modifying said magnetic field and including for this purpose at least one discontinuity, said sensor comprising at least one planar transmitter coil for transmitting said alternating magnetic field and at least one planar receiver coil located so as to sense a determined portion of said field and the variations of said magnetic portion sensed due to the discontinuity of said object, said coils being disposed on a common substrate and formed by selective photolithography operations, wherein at least in the areas of the substrate in which said transmitter coil is contiguous with said receiver coil, there is provided at least one capacitive decoupling band electrically independent of said coils and connected to a reference potential, said capacitive decoupling band being formed from a metallization layer deposited on said substrate.
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Abstract
This micromachined inductive sensor is used to detect, without contact and through the intermediary of a radiated alternating magnetic field, the position and/or the movement of an object capable of modifying this magnetic field and including for this purpose at least one discontinuity. The sensor comprises a planar transmitter coil for transmitting the alternating magnetic field and planar receiver coils located so as to sense a determined portion of said field and the variations of this magnetic portion sensed due to the discontinuity of the object. The coils are disposed on a common substrate and obtained by selective photolithography operations. According to the invention, in the areas of the substrate in which the transmitter coil is contiguous with a receiver coil, there is provided at least one shielding band electrically independent of the coils and connected to a reference potential. The shielding band is formed from a metallization layer deposited on the substrate.
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Citations
12 Claims
- 1. A micromachined inductive sensor for detecting, without contact and through the intermediary of a radiated alternating magnetic field, the position and/or the movement of an object capable of modifying said magnetic field and including for this purpose at least one discontinuity, said sensor comprising at least one planar transmitter coil for transmitting said alternating magnetic field and at least one planar receiver coil located so as to sense a determined portion of said field and the variations of said magnetic portion sensed due to the discontinuity of said object, said coils being disposed on a common substrate and formed by selective photolithography operations, wherein at least in the areas of the substrate in which said transmitter coil is contiguous with said receiver coil, there is provided at least one capacitive decoupling band electrically independent of said coils and connected to a reference potential, said capacitive decoupling band being formed from a metallization layer deposited on said substrate.
Specification