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Micromachined inductive sensor having capacitively decoupled coils

  • US 6,175,232 B1
  • Filed: 04/07/1998
  • Issued: 01/16/2001
  • Est. Priority Date: 04/07/1997
  • Status: Expired due to Term
First Claim
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1. A micromachined inductive sensor for detecting, without contact and through the intermediary of a radiated alternating magnetic field, the position and/or the movement of an object capable of modifying said magnetic field and including for this purpose at least one discontinuity, said sensor comprising at least one planar transmitter coil for transmitting said alternating magnetic field and at least one planar receiver coil located so as to sense a determined portion of said field and the variations of said magnetic portion sensed due to the discontinuity of said object, said coils being disposed on a common substrate and formed by selective photolithography operations, wherein at least in the areas of the substrate in which said transmitter coil is contiguous with said receiver coil, there is provided at least one capacitive decoupling band electrically independent of said coils and connected to a reference potential, said capacitive decoupling band being formed from a metallization layer deposited on said substrate.

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