Method and apparatus for using shuttered windows in a micro-electro-mechanical system

• US 6,177,800 B1
• Filed: 11/10/1998
• Issued: 01/23/2001
• Est. Priority Date: 11/10/1998
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Wallace, Stanley J., Kubby, Joel A., Peeters, Eric, Viturro, R. Enrique, Hubble, Fred F. III, Werner, Alan J. Jr.
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): Kerveros, James
• Application Number:
  US09/200,353
• Time in Patent Office: 805 Days
• Field of Search: 324/458, 324/72, 324/457, 324/455, 324/109, 324/660, 324/686, 324/690, 361/296, 361/277, 361/278, 361/280, 361/287, 361/292, 361/289
• US Class Current: 324/458
• CPC Class Codes: G01R 15/165 measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential electrometers with passively moving electrodes G01R5/28; measuring electrostatic fields G01R29/12; measuring charge G01R29/24; measuring in circuits with high internal resistance G01R19/0023
• CPC Class Codes: G01R 29/12 Measuring electrostatic fields or voltage-potential
• CPC Class Codes: G01R 29/24 Arrangements for measuring quantities of charge

Abstract

A windowed shutter on a micro-electro-mechanical system improves output current of a non-contacting electrostatic voltmeter. The output current is increased by increasing the area modulated by the micro-electro-mechanical shutter system and by increasing the speed of that modulation. The increase in the area modulated by the windowed shutter is in direct proportion to the number of windows used. Moreover, the speed of the modulation is increased by increasing the resonant frequency of the system. Less shutter mass increases the frequency thus increasing shutter movement over time.

Claims

1. An electrostatic voltmeter comprising:

a sense probe assembly for measuring a voltage by capacitive coupling;

a shutter defining a plurality of windows movable between a first position where the sense probe assembly is exposed and a second position where the sense probe assembly is covered, the shutter being adjacent to the sense probe assembly; and

a shutter driver operatively associated with the shutter for selectively moving the shutter between the first position and the second position.

2. The electrostatic voltmeter of claim 1 where the shutter driver comprises:

a micro-electro-mechanical system having an electrostatic comb drive defining a maximum displacement (δ

x) along an axis parallel to the comb fingers.

3. The electrostatic voltmeter of claim 2 where each of the plurality of windows defines a length (1) perpendicular to the comb fingers and a width (w) parallel to the comb fingers, the width being equal to the maximum displacement.

4. The electrostatic voltmeter of claim 3 where the shutter driver modulates the shutter at a resonant frequency of the voltmeter.

5. A method to increase an output signal produced by a non-contacting voltmeter comprising:

providing a plurality of sense probes;

placing a movable shutter adjacent to the sense probes, the shutter defining a plurality of windows spaced to expose the sense probes in a first position, and cover the sense probes in a second position; and

moving the shutter between the first position and the second position.

6. The method of claim 5 wherein the providing step further comprises:

capacitively coupling to a surface to be measured; and

producing the output signal based on the coupling step.

7. The method of claim 6 wherein the moving step comprises:

attaching the shutter to a micro-electro-mechanical system actuated by a comb type drive; and

applying an electrostatic drive signal to the comb type drive.

8. The method of claim 7 wherein the comb type drive defines a maximum displacement (δ

x) and the plurality of windows each define a width equal to the maximum displacement.

9. In a voltmeter where a shutter is used to alternatingly cover and uncover a first detector defining a modulated area thereby producing a current proportional to the modulated area the improvement comprising:

a plurality of additional detectors connected to and adjacent to the first detector and spaced along the path of shutter movement; and

a plurality of windows in the shutter, the windows distanced from each other such that the windows uncover and cover the first and the additional detectors simultaneously.

10. The improved voltmeter of claim 9 where the shutter motion defines a maximum displacement (δ

x) and the windows define a width substantially equal to the maximum displacement.

11. A MEMS modulator assembly for modulating a preselected condition comprising:

a first surface;

a second surface spaced from the first surface and in selective operative communication with the first surface via the preselected condition; and

,

a shutter including spaced first and second windows disposed between the first and second surfaces and movable between a first position where the surface operatively communicates with the second surface and a second position where the first surface is masked relative to the second surface.

12. The MEMS modulator of claim 11 wherein the first and second windows have a dimension measured in the direction of shutter movement substantially identical to the maximum extent of shutter movement.

13. The MEMS modulator of claim 11 wherein the first and second windows are spaced from one another a dimension substantially identical to the extent of shutter movement.

14. The MEMS modulator of claim 11 wherein the preselected condition is modulating light emitted or directed from the first surface.