Microejector pump
First Claim
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1. A microejector pump for generating microdroplets, comprising:
- a silicon chip having at least one pump chamber;
a piezoelectrically actuable silicon membrane arranged over the pump chamber, the pump chamber being connected to at least one supply passage and one outlet passage provided with an ejection orifice; and
a glass chip closing off the pump chamber opposite the silicon membrane, wherein the supply passage located in the silicon chip is configured at least in part as a diffuser element in the direction of the pump chamber and the outlet passage opens in an exit plane.
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Abstract
A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller.
84 Citations
17 Claims
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1. A microejector pump for generating microdroplets, comprising:
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a silicon chip having at least one pump chamber;
a piezoelectrically actuable silicon membrane arranged over the pump chamber, the pump chamber being connected to at least one supply passage and one outlet passage provided with an ejection orifice; and
a glass chip closing off the pump chamber opposite the silicon membrane, wherein the supply passage located in the silicon chip is configured at least in part as a diffuser element in the direction of the pump chamber and the outlet passage opens in an exit plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
a temperature sensor arranged on the silicon chip; - and
a control circuit operatively coupled to the sensor and to the electrical contacts for providing control of the heater.
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15. The microejector pump according to claim 14, wherein the electrical contacts and the temperature sensor consist of a photo-lithographically structured platinum or tantalum coating.
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16. The microejector pump according to claim 1, further comprising a parallel arrangement of a plurality of pump chambers, each with a respective inlet diffuser and a respective outlet passage.
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17. The microejector pump according to claim 16, further comprising at least one aspiration passage having an opening in the exit plane is interposed between adjacent outlet passages.
Specification