Electromagnetic force controlled micromirror array

• US 6,181,460 B1
• Filed: 11/18/1998
• Issued: 01/30/2001
• Est. Priority Date: 11/18/1998
• Status: Expired due to Term

• Current Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Original Assignee: TRW Inc. (Northrop Grumman Corporation)
• Inventors: Anderson, Eric R., Jones, William L., Tran, Dean, Rezek, Edward A.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US09/195,534
• Time in Patent Office: 804 Days
• Field of Search: 359/290, 359/291, 359/298, 359/221, 359/224, 359/230, 359/280, 359/281, 438/52, 438/72, 257/415, 257/417, 257/421, 257/659
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromirror device (10) is provided with a rotatable optical component (22) for use in a digital image processing application. The micromirror device (10) includes a semiconductor wafer (12), having a recess (14) formed therein, and a platform (20) with the optical component (22) deposited thereon that is movably coupled to the side surface of the recess (14). A first magnetic field source (24) is disposed around the periphery of the optical component (22) on the platform (20) and a second magnetic field source (26) is disposed proximate to this first magnetic field source (24), such that these magnetic field sources are selectively activatable to generate an electromagnetic field for rotating the platform (20). More specifically, the second magnetic field source (26) is disposed on the angular side surfaces of the recess (14) or adjacent to the recess (14) on a top surface of the wafer (12). A magnetic strip (30) may optionally be disposed on the bottom surface of the recess (14) for concentrating the electromagnetic field.

Claims

1. A micromirror device for use in a digital image processor, comprising:

a substrate having a recess formed therein;

a platform rotatably attached to said substrate;

an optical element deposited on said platform;

a first magnetic field source deposited on said platform; and

a second magnetic field source disposed proximate to said platform, said first and second magnetic field sources being selectively activatable to generate an electromagnetic field for actuating said platform.

2. The micromirror device of claim 1 wherein said first magnetic field source is disposed substantially around the periphery of said optical element on said platform.

3. The micromirror device of claim 1 wherein said platform is rotatably coupled by at least one hinge to said substrate.

4. The micromirror device of claim 3 further comprising a third magnetic field source disposed across from said second magnetic field source on the top surface of said substrate.

5. The micromirror device of claim 1 wherein said second magnetic field source is disposed adjacent to said recess on a top surface of said substrate.

6. The micromirror device of claim 1 wherein said recess has a bottom surface and at least one angular side surface, said second magnetic field source being disposed on said angular side surface of said recess.

7. The micromirror device of claim 1 further comprising a magnetic element disposed on a bottom surface of said recess for concentrating the electromagnetic field.

8. The micromirror device of claim 1 wherein said optical element and said first magnetic field source are substantially planar on the surface of said platform.

9. The micromirror device of claim 1 wherein said first magnetic field source includes a first current source connected to a first conductive coil, and said second magnetic field source includes a second current source connected to a second conductive coil.

10. The micromirror device of claim 9 wherein at least one of said first and second conductive coils is further defined by a plurality of windings to increase the electromagnetic field.

11. The micromirror device of claim 9 wherein at least one of said first and second current sources regulates the direction of current flow, thereby controlling the direction of said electromagnetic field.

12. The micromirror device of claim 1 wherein said platform is pivotably coupled by a hinge to said substrate and said second magnetic field source is disposed on a bottom surface of said recess.