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Accelerometer without proof mass

  • US 6,182,509 B1
  • Filed: 10/21/1998
  • Issued: 02/06/2001
  • Est. Priority Date: 06/26/1996
  • Status: Expired due to Term
First Claim
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1. An accelerometer, comprising:

  • (a) a substrate having an open space therein;

    (b) a heater extending across said open space;

    (c) a pair of temperature sensitive elements extending across said open space, said temperature sensitive elements being located on opposite sides of said heater; and

    (d) an enclosure extending over said open space including said heater and said temperature sensitive elements and enclosing a non-solid heat transfer medium surrounding said heater and said temperature sensitive elements;

    wherein said open space, said heater and said temperature sensitive elements are formed by micromachining.

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