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Resonant sensor and method of making a pressure sensor comprising a resonant beam structure

  • US 6,182,513 B1
  • Filed: 12/23/1998
  • Issued: 02/06/2001
  • Est. Priority Date: 12/23/1998
  • Status: Expired due to Term
First Claim
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1. A resonant microbeam pressure sensor comprising:

  • a substrate;

    a flexible diaphragm provided on said substrate such as to form a cavity between said substrate and said diaphragm; and

    at least one resonant microbeam suspended by said diaphragm at one or more points such that said microbeam is suspended beneath said diaphragm.

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