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X-ray scanning method and apparatus

  • US 6,183,139 B1
  • Filed: 10/06/1998
  • Issued: 02/06/2001
  • Est. Priority Date: 10/06/1998
  • Status: Expired due to Term
First Claim
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1. A method of moving a charged particle beam across a target assembly to generate an image comprising:

  • x-ray illuminating an object to be imaged by moving a charged particle beam across a plurality of sets of positions on a target assembly during a frame, the x-ray illuminating of the object to be imaged beginning at a first time point, the x-ray illuminating of an object to be imaged ending at a second time point, the period of time between the first time point and the second time point being sufficiently small to prevent image blurring due to object motion, the plurality of sets of positions comprising a first set of positions and a second set of positions;

    moving the charged particle beam across the first set of positions on the target assembly a first time;

    moving the charged particle beam across the first set of positions on the target assembly a second time; and

    moving the charged particle beam across a second set of positions on the target assembly after moving the charged particle beam across the first set of positions on the target assembly the first and second times.

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