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Manufacture method of high coercivity FePt-Si3N4 granular composite thin films

  • US 6,183,606 B1
  • Filed: 11/03/1999
  • Issued: 02/06/2001
  • Est. Priority Date: 11/03/1999
  • Status: Expired due to Term
First Claim
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1. A method for producing high coercivity FePt—

  • Si3N4 granular composite thin film, comprising the steps of;

    (a) co-sputtering an FePt target and a Si3N4 target on a substrate by use of a conventional magnetron sputtering system to form a deposited film;

    (b) annealing the film in a vacuum under controlled conditions for an annealing temperature and time period; and

    (c) quenching the film in a quenching liquid to form a post-annealed FePt—

    Si3N4 granular film having magnetic properties of Ms>

    375 emu/cm3 and Hc>

    2000 Oe, respectively.

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