Manufacture method of high coercivity FePt-Si3N4 granular composite thin films

• US 6,183,606 B1
• Filed: 11/03/1999
• Issued: 02/06/2001
• Est. Priority Date: 11/03/1999
• Status: Expired due to Term

• Current Assignee: National Science Foundation (Government of the United States of America)
• Original Assignee: National Science Foundation (Government of the United States of America)
• Inventors: Kuo, Po-Cheng, Kuo, Chih-Ming
• Primary Examiner(s): DIAMOND, ALAN D
• Application Number:
  US09/433,784
• Time in Patent Office: 461 Days
• Field of Search: 204/192.15, 204/192.2, 204/192.22, 752/30, 752/44, 752/45, 752/46, 428/65.3, 428/411.1, 428/432, 428/433, 428/694.T, 428/692, 428/900, 428/698, 420/466, 420/128, 420/8
• US Class Current: 204/192.15
• CPC Class Codes: C23C 14/0688 Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: G11B 5/657 containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound containing oxygen G11B5/658
• CPC Class Codes: G11B 5/851 Coating a support with a magnetic layer by sputtering
• CPC Class Codes: Y10S 428/90 Magnetic feature
• CPC Class Codes: Y10T 428/31504 Composite [nonstructural laminate]

Abstract

A method of producing high coercivity FePt—Si₃N₄ granular composite thin films for magnetic recording media is invented. The method includes magnetron co-sputtering of FePt and Si₃N₄ targets at controlled sputtering power and sputtering argon gas pressure to form a selective composition of granular FePt—Si₃N₄ thin film on a low temperature substrate, then post-annealed in vacuum at selective time period and temperature. Two kinds of FePt targets can be used. One is the FePt alloy target. The other one is a composite target consisting of an iron disk overlaid with small Pt pieces. This arrangement provides a wide range of effective target compositions and therefore film compositions. FePt—Si₃N₄ films were deposited on natural oxidized silicon wafer or quartz glass substrate at room temperature. The as-deposited film has soft magnetic properties and granular structure with soft magnetic γ-FePt particles dispersed in amorphous Si₃N₄ matrix. The as-deposited film cannot be used as magnetic recording medium due to its low coercivity. After annealing at controlled conditions for a desirable temperature and time period in vacuum, the film also has granular structure but the magnetic soft γ-FePt phase is transformed into magnetic hard γ₁-FePt phase. This film has high coercivity and its magnetic easy-axis is parallel to the film plane. It may be used as high-density magnetic recording medium.

Claims

1. A method for producing high coercivity FePt—

Si₃N₄ granular composite thin film, comprising the steps of;

(a) co-sputtering an FePt target and a Si₃N₄ target on a substrate by use of a conventional magnetron sputtering system to form a deposited film;

(b) annealing the film in a vacuum under controlled conditions for an annealing temperature and time period; and

(c) quenching the film in a quenching liquid to form a post-annealed FePt—

Si₃N₄ granular film having magnetic properties of Ms>

375 emu/cm³ and Hc>

2000 Oe, respectively.

2. The method of claim 1, wherein a power supply for the magnetron sputtering system is selected from the group consisting of DC and RF.

3. The method of claim 1, wherein the FePt target is selected from the group consisting of an FePt alloy target and an FePt composite target, wherein said composite target comprises an iron disk overlaid with platinum pieces.

4. The method of claim 1, wherein said substrate is a natural oxidized silicon wafer or a quartz glass substrate.

5. The method of claim 1, wherein step (a) is performed with an argon pressure (P_Ar) of between 0.3 and 20 mTorr.

6. The method of claim 5, wherein the argon pressure (P_Ar) is about 5 mTorr.

7. The method of claim 1, wherein the substrate has a temperature of less than 45 degrees Celsius.

8. The method of claim 7, wherein the substrate temperature is about 25 degrees Celsius.

9. The method of claim 1, wherein an atomic ratio of Fe:

Pt in the granular composite film is in the range of 55;

45 to 45;

55.

10. The method of claim 9, wherein the atomic ratio of Fe:

Pt in the granular composite film is about 50;

50.

11. The method of claim 1, wherein a volume fraction of FePt:

Si₃N₄ in the granular composite film is in the range of 80;

20 to 50;

50.

12. The method of claim 11, wherein the volume fraction of FePt:

Si₃N₄ in the granular composite film is about 70;

30.

13. The method of claim 1, wherein the vacuum has a working pressure of lower than 1×

10<sup>−

6</sup> Torr.

14. The method of claim 1, wherein the annealing temperature is between 400 and 800 degrees Celsius and the time period is between 5 and 90 minutes.

15. The method of claim 14, wherein the annealing temperature is about 600 degrees Celsius and the time period is 30 minutes.

16. The method of claim 1, wherein the quenching liquid is water.

17. The method of claim 16, wherein the water has a temperature of about 0 degrees Celsius.

18. The method of claim 1, wherein the quenching liquid has a temperature of less than 5 degrees Celsius.

19. The method of claim 1, wherein said FePt—

Si₃N₄ granular composite thin film serves as a magnetic recording media.