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Photodiode detector with integrated noise shielding

  • US 6,184,521 B1
  • Filed: 01/06/1998
  • Issued: 02/06/2001
  • Est. Priority Date: 01/06/1998
  • Status: Expired due to Term
First Claim
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1. A shielded detector comprising:

  • a photodetector having an active area exposed to receive light and responsive to light within a band of wavelengths; and

    a shield deposited on a portion of said active area, said shield comprising an electrically conductive layer deposited on said portion of said active area, said shield providing an integrated electromagnetic shield for reducing EMI-induced noise in said photodetector, wherein said conductive layer comprises a metallization layer deposited directly on said portion of said active area to form said shield and an electrode for said photodetector, said electrode being substantially electrically isolated from said shield.

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