Method and apparatus for absolutely measuring flat and sperical surfaces with high spatal resolution

• US 6,184,994 B1
• Filed: 10/20/1999
• Issued: 02/06/2001
• Est. Priority Date: 10/20/1999
• Status: Expired due to Term

• Current Assignee: Ade Phase Shift Technology
• Original Assignee: Ade Phase Shift Technology
• Inventors: Freischlad, Klaus
• Primary Examiner(s): KIM, ROBERT H
• Application Number:
  US09/421,636
• Time in Patent Office: 475 Days
• Field of Search: 356/511, 356/513, 356/514, 356/515
• US Class Current: 356/511
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 11/306 for measuring evenness
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02083 characterised by particular signal processing and presentation
• CPC Class Codes: G01B 9/02084 Processing in the Fourier or frequency domain when not imaged in the frequency domain

Abstract

The absolute interferometric measurement of the shape of either flat, or spherical surfaces is achieved by incorporating a Fizeau-interferometer and a test piece holder capable of several degrees of freedom of movement relative to the reference position in the interferometer. A data acquisition and processing technique inter-compares three test parts in various combinations. Full surface absolute maps for each of the test pieces are determined using at least two different rotational positions of one test-piece to yield rotationally sheared maps of that surface. An optimized numerical reconstruction algorithm employing linear filtering and superposition of different angular shear spectra in the angular frequency domain is employed. The method does not require any assumptions about the surfaces under test; and it has low error propagation, even in the case of high spatial resolution.

Claims

1. A method for absolute surface testing of planar or spherical surfaces including the steps of:

employing a phase shifting interferometer with a reference surface position and a test surface position;

placing a first test piece A in the reference surface position;

placing a second test piece C in the test surface position;

using the interferometer to produce a measured difference map m₁ of the first and second test pieces;

replacing the first test piece A with a third test piece B in the reference position and using the interferometer to produce a measured difference map m_a, of the third and second test pieces;

the second test piece C with the first test piece A in the test surface position and using the interferometer to produce a measured difference map m₃, of the third (B) and first (A) test pieces;

rotating the test piece (A) at the test surface position by at least two additional different predetermined angular amounts and using the interferometer to produce measured difference maps m₄. . . m_m-3, of the third (B) and first (A) test pieces at the positions of each of the at least two different predetermined angular amounts positions;

Calculating rotationally sheared surface maps of the first test piece A; and

using the measured difference maps and the rotationally sheared surface maps to produce absolute surface maps of the first (A), second (B) and third (C) test pieces.

2. The method according to claim 1 wherein the first, second and third test pieces are flat test pieces.

3. The method-according to claim 2 wherein the test surface is carried on apparatus which permits the further step of adjusting the position of a test piece placed in the test surface position thereof relative to the reference surface position of the interferometer.

4. The method according to claim 3 wherein the step of adjusting the position of a test piece placed in the test position of the interferometer includes rotating, tilting and tipping as well as displacing the test piece in either of two orthogonal directions.

5. The method according to claim 4 wherein the step of using the measured difference maps and the rotationally sheared surface maps to provide absolute surface maps of the first, second and third test pieces includes re-mapping the rotationally sheared surface maps into a circular coordinate system and Fourier transforming the re-mapped maps to obtain angular frequency spectra.

6. The method according to claim 5 further including the steps of:

applying a multiplicative filter to the angular frequency spectra to combine the spectra in a weighted summation;

inversely Fourier transforming the summed angular frequency spectrum to obtain the rotationally non-symmetric part of the surface of the first test piece A.

7. The method according to claim 6 wherein the individual absolute surface maps h are represented by the following equations

8. The method according to claim 7 further including the step of linear filtering and superposition as set forth in the following equation:

$L<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)=\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)<br><br>\frac{S_j<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)}{\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)}$

where s_j is the angular spectra of the rotationally sheared surface maps, w_j is the normalized weights, δ

(α

_j,f_θ

) is the differencing filter given by (e<sup>2xiα

jfe</sup> −

1).

9. The method according to claim 8 wherein the superposition is weighted according to the following equation:

$w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)=\frac{|\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>{|}^2}{\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>|\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>{|}^2}.$

10. The method according to claim 9 wherein the phase-shifting interferometer used is a Fizeau interferometer.

11. The method according to claim 1 wherein the first, second and third test pieces have spherical surfaces.

12. The method according to claim 11 wherein the test surface is carried on apparatus which permits the further step of adjusting the position of a test piece placed in the test surface position thereof relative to the reference surface position of the interferometer.

13. The method according to claim 12 wherein the step of adjusting the position of a test piece placed in the test position of the interferometer includes rotating, tilting, tipping, axial moving, as well as displacing the test piece in either of two orthogonal directions.

14. The method according to claim 13 wherein the step of using the difference maps to provide absolute surface maps of the first, second and third test pieces includes re-mapping the difference maps into a circular coordinate system and Fourier transforming the re-mapped maps to obtain angular frequency spectra.

15. The method according to claim 14 further including the steps of:

applying a multiplicative filter to the angular frequency spectra to combine the spectra in a weighted summation;

inversely Fourier transforming the summed angular frequency spectrum to obtain the rotationally non-symmetric part of the surface of the first test piece A.

16. The method according to claim 15 wherein the individual surface maps are represented by the following equations

17. The method according to claim 16 further including the step of linear filtering and superposition as set forth in the following equation:

$L<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)=\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)<br><br>\frac{S_j<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)}{\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)}$

where s_j is the angular spectra of the rotationally sheared surface maps, w_j is the normalized weights, δ

(α

_j,f_θ

) is the differencing filter given by (e<sup>2xiα

jf3</sup>−

1).

18. The method according to claim 17 wherein the superposition is weighted according to the following equation:

$w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)=\frac{|\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>{|}^2}{\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>|\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>{|}^2}.$

19. The method according to claim 18 wherein the phase-shifting interferometer used is a Fizeau interferometer.

20. The method according to claim 1 wherein the step of using the difference maps to provide absolute surface maps of the first, second and third test pieces includes re-mapping the difference maps into-a circular coordinate system and Fourier transforming the re-mapped maps to obtain angular frequency spectra.

21. The method according to claim 20 further including the steps of:

applying a multiplicative filter to the angular frequency spectra to combine the spectra in a weighted summation;

inversely Fourier transforming the summed angular frequency spectrum to obtain the rotationally non-symmetric part of the surface of the first test piece A.

22. The method according to claim 21 wherein the individual surface maps are represented by the following equations

23. The method according to claim 22 further including the step of linear filtering and superposition as set forth in the following equation:

$L<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)=\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)<br><br>\text{\hspace{1em}<br><br>}<br><br>\frac{S_j<br><br>\left(r,f_{\mathrm{\theta <br><br>}}\right)}{\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)}$

where s_j is the angular spectra of the rotationally sheared surface maps, w_j is the normalized weights, δ

(α

_j,f_θ

) is the differencing filter given by -(e<sup>2xiα

jf3</sup>−

1).

24. The method according to claim 23 wherein the superposition is weighted according to the following equation:

$w_j<br><br>\left(f_{\mathrm{\theta <br><br>}}\right)=\frac{{<br><br>\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>}^2}{\underset{j=1}{\overset{M-3}{\sum <br><br>}}<br><br>{<br><br>\mathrm{\delta <br><br>}<br><br>\left({\mathrm{\alpha <br><br>}}_j,f_{\mathrm{\theta <br><br>}}\right)<br><br>}^2}.$

25. A system for absolute surface testing of planar or spherical surfaces including in combination:

a phase shifting interferometer having a reference surface position and a test surface position for holding, respectively, a reference element and a test element in alignment with one another, with the reference surface position being fixed with respect to the remainder of elements of the interferometer and the test surface position mounted on a test piece mount including mechanisms for;

(A) effecting tilt of the test element in the y axis,

(B) effecting tipping of the test element in the x axis,

(C) angularly rotating the test element relative to the reference surface, and

(D) effecting orthogonal translation of the test element in both the x and y directions;

means for producing measured difference maps of first (A), second (B), and third (C) test elements in the following combinations at the reference surface positions and the test surface positions;

Measurement m₁;

reference surface=A, test surface=C

Measurement m₂;

reference surface=B, test surface=C

Measurement m₃;

reference surface=B, test surface=A and at least two more rotational positions of flat A at the test surface position;

Measurement m₄;

reference surface=B, test surface=A rotated by α

₁,

Measurement m₅;

reference surface=B, test surface=A rotated by means for calculating rotationally sheared surface maps of the first test element A; and

means for utilizing the measured difference maps and the rotationally sheared surface maps to produce absolute surface maps of the first (A), second (B), and third (C) test pieces.

26. The system according to claim 25 wherein the phase shifting interferometer is Fizeau interferometer.

27. The interferometer according to claim 25 wherein the test piece mount mechanism further includes a mechanism for effecting axial translation of the test piece toward and away from the reference surface.