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Method of manufacturing a sensor detecting a physical action as an applied force

  • US 6,185,814 B1
  • Filed: 02/06/1998
  • Issued: 02/13/2001
  • Est. Priority Date: 12/28/1989
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a sensor for detecting a physical action as an applied force, said method comprising the steps of:

  • providing a first substrate having opposite first and second surfaces;

    defining a first area, a second area and a third area on said first surface of said first substrate,said second area having a shape of a square ring with a width, said first area being located inside said second area and said third area being located outside said second area;

    providing a detection element within said second area on said first surface of said first substrate, said detection element being for detecting mechanical deformation of said first substrate in said second area; and

    providing first, second, third and fourth grooves on said second surface of said first substrate, said first groove and said second groove being located along two opposite sides of said square ring and said third groove and said fourth groove being located along another two opposite sides of said square ring so that said grooves define parallel crosses for allowing said second area to flex under an applied force;

    whereby to detect a physical action as said force applied to said first area or said third area.

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