Semiconductor process chamber having improved gas distributor

• US 6,185,839 B1
• Filed: 05/28/1998
• Issued: 02/13/2001
• Est. Priority Date: 05/28/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lubomirsky, Dmitry, Kholodenko, Arnold, Loewenhardt, Peter K., Shiau, Guang-Jye, Shamouilian, Shamouil
• Primary Examiner(s): Gravini, Stephen
• Assistant Examiner(s): Mattera, Michelle A
• Application Number:
  US09/086,704
• Time in Patent Office: 992 Days
• Field of Search: 342/55, 342/58, 344/13, 344/18, 344/20, 345/26, 345/62, 345/65, 34/60, 34/61, 34/90, 341/95, 342/10, 118/715, 118/723
• US Class Current: 34/255
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

A process chamber 25 for processing a semiconductor substrate, comprises a support for supporting a substrate 50. A gas distributor 90 provided for introducing process gas into the chamber 25, comprises a gas nozzle for injecting process gas at an inclined angle relative to a plane of the substrate 50, into the chamber 25. Optionally, a gas flow controller 100 controls and pulses the flow of process gas through one or more gas nozzles 140. An exhaust is used to exhaust the process gas from the chamber 25.

Claims

1. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor adapted to introduce process gas into the process chamber at an inclined angle relative to the surface of the support to direct a flow of process gas against a surface of the chamber;

(c) a gas energizer; and

(d) an exhaust,

whereby the substrate held on the support may be processed by process gas introduced into the process chamber by the gas distributor, energized by the gas energizer, and exhausted by the exhaust.

2. The process chamber of claim 1 wherein the gas distributor is adapted to introduce process gas at an inclined angle of from about 30 to about 80°

relative to the surface of the support.

3. The process chamber of claim 1 wherein the gas distributor is adapted to introduce the process gas toward a surface of the process chamber above the support substrate.

4. The process chamber of claim 1 wherein the gas distributor comprises a plurality of outlets.

5. The process chamber of claim 4 wherein the outlets introduce process gas at an inclined angle that is sufficiently large to cause two streams of process gas to impinge against one another to form a circulating gas stream in the process chamber.

6. The process chamber of claim 4 further comprising a gas flow controller that alternates the flow of process gas between one outlet and another outlet.

7. The process chamber of claim 4 wherein the gas distributor comprises at least one pair of outlets that face one another.

20. The process chamber of claim 1 wherein the gas distributor comprises an outlet that extends through an enclosure around the support.

21. The process chamber of claim 20 wherein the enclosure comprises a collar and wherein the outlet extends through the collar.

8. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor comprising a plurality of outlets to provide gas into the process chamber and a gas flow controller that alternates the flow of gas between the outlets;

(c) a gas energizer; and

(d) an exhaust,

whereby the substrate on the support is processed by gas provided in the process chamber by the gas distributor, energized by the gas energizer, and exhausted by the exhaust.

9. The process chamber of claim 8 further comprising a pair of facing outlets.

10. The process chamber of claim 9 wherein the gas flow controller comprises a computer controller system and computer-usable medium having computer program code that operates the outlets to alternately flow gas through the facing pair of outlets.

11. The process chamber of claim 10 further comprising a second pair of facing outlets and wherein the computer program code comprises code instructions sets that operates flow valves to flow a first burst of gas through one pair of facing outlets, and thereafter, flows a second burst of gas through another pair of facing outlets.

12. The process chamber of claim 8 wherein the gas distributor comprises outlets that introduce gas into the process chamber at an inclined angle relative to the surface of the support.

22. The process chamber of claim 8 further comprising an enclosure around the support and wherein the outlets extend through the enclosure.

23. The process chamber of claim 22 wherein the enclosure comprises a collar and wherein the outlets extend through the collar.

13. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor comprising first and second outlets that are adapted to introduce gas into the process chamber;

(c) a gas flow controller comprising a computer controller system and computer-usable medium comprising computer program code that operates the gas distributor to (1) flow process gas through the first outlet for a time period, and thereafter, stop the flow of gas through the first outlet, and (2) flow gas through the second outlet for another time period, and thereafter, stop the flow of gas through the second outlet;

(d) a gas energizer; and

(e) an exhaust,

whereby the substrate on the support is processed by the gas provided in the process chamber by the first and second outlets, energized by the gas energizer, and exhausted by the exhaust.

14. The process chamber of claim 13 wherein the first outlet and the second outlet face one another.

15. The process chamber of claim 13 wherein the first and second outlets are adapted to introduce gas at an inclined angle relative to the surface of the support.

24. The process chamber of claim 13 further comprising an enclosure around the support and wherein the outlets extend through the enclosure.

25. The process chamber of claim 24 wherein the enclosure comprises a collar and wherein the outlets extend through the collar.

16. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor comprising outlets capable of introducing gas into the process chamber at an inclined angle relative to the surface of the support, the inclined angle being sufficiently large to allow two streams of gas to impinge against one another;

(c) a gas energizer; and

(d) an exhaust capable of exhausting the gas from the process chamber.

17. The process chamber of claim 16 wherein the outlets introduce the gas at an inclined angle of from about 30 to about 80°

.

18. The process chamber of claim 17 further comprising a dome ceiling that provides a radius of curvature that is sufficiently large to direct an incident stream of gas, downward, and toward the substrate.

19. The process chamber of claim 16 further comprising a gas flow controller that alternates the flow of gas between different outlets at different locations in the process chamber.

26. The process chamber of claim 16 wherein the outlets are above the support.

27. The process chamber according to claim 16 further comprising a dome ceiling above the support.

28. The process chamber of claim 16 wherein the gas energizer comprises an antenna to couple energy to gas in the process chamber.

29. The process chamber of claim 16 further comprising a collar that extends around the circumference of the chamber and wherein the outlets extend through the collar.

30. The process chamber of claim 16 wherein the outlets are adapted to introduce the gas at an inclined angle of from about 30 to about 80°

.

31. The process chamber of claim 30 further comprises a dome ceiling having a radius of curvature that is sufficiently large to direct an incident stream of gas, downward, and toward the substrate.

32. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor comprising a first and a second outlet adapted to introduce gas into the process chamber, wherein the first outlet is inclined relative to the second outlet and wherein one of the outlets is substantially parallel to the surface of the support;

(c) a gas energizer; and

(d) an exhaust,

whereby the substrate on the support may be processed by gas introduced into the process chamber by the gas distributor, energized by the gas energizer, and exhausted by the exhaust.

33. The process chamber of claim 32 further comprising an enclosure having a wall around the support wherein the outlets extend through the enclosure.

34. The process chamber of claim 33 wherein the enclosure comprises a collar and wherein the outlets extend through the collar.

35. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) an enclosure around the substrate support;

(c) a gas distributor adapted to introduce gas into the process chamber, the gas distributor comprising an opening through the enclosure, wherein the opening is angled relative to the surface of the support.

36. The process chamber of claim 35, wherein the enclosure comprises a collar and wherein the opening extends through the collar.

37. The process chamber of claim 35 further comprising a plurality of openings and a gas flow controller that alternates the flow of process gas between one opening and another opening.

38. A process chamber capable of processing a substrate, the process chamber comprising:

(a) a support having a surface capable of supporting the substrate;

(b) a gas distributor comprising an outlet above the support, the gas distributor being adapted to introduce gas into the process chamber at an inclined angle relative to the surface of the support;

(c) a gas energizer; and

(d) an exhaust,

whereby the substrate on the support may be processed by gas introduced into the process chamber by the gas distributor, energized by the gas energizer, and exhausted by the exhaust.

39. The process chamber of claim 38 wherein the gas distributor is adapted to introduce the gas at an inclined angle of from about 30 to about 80°

relative to the surface of the support.

40. The process chamber of claim 38 wherein the gas distributor is adapted to introduce the gas toward a surface of the process chamber above the support substrate.

41. The process chamber of claim 38 wherein the gas distributor comprises a plurality of outlets.

42. The process chamber of claim 41 wherein the outlets introduce gas at an inclined angle that is sufficiently large to cause two streams of gas to impinge against one another to form a circulating gas stream in the chamber.

43. The process chamber of claim 41 further comprising a gas flow controller that alternates the flow of gas between one outlet and another outlet.

44. The process chamber of claim 41 wherein the gas distributor comprises at least one pair of outlets that face one another.