Platen for semiconductor workpieces

• US 6,188,563 B1
• Filed: 09/14/1998
• Issued: 02/13/2001
• Est. Priority Date: 09/18/1997
• Status: Expired due to Term

• Current Assignee: SPTS Technologies Limited (KLA Corporation)
• Original Assignee: Trikon Equipments Limited
• Inventors: Green, Gordon Robert
• Primary Examiner(s): Leja, Ronald W.
• Application Number:
  US09/152,673
• Time in Patent Office: 883 Days
• Field of Search: 361/230-235, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks

Abstract

A Platen, generally indicated at (10), comprises a ceramic body (11) and a workpiece support surface (12) and a base (13). Embodied within the body (11) are an electrostatic chuck electrode (40), an RF electrode (15), a heater (16), a ground plane electrode (17), an embedded thermocouple (18), and a stainless steel support (19). This combination provides a platen which can be RF driven, but has a screen to prevent unwanted plasma beneath the platen. The chuck can also be utilized as an electrostatic chuck.

Claims

1. A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;

an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto; and

a ground plane electrode disposed in the body between the RF electrode and the base.

2. A platen as claimed in claim 1, wherein the platen is an electrostatic chuck with an electrostatic electrode.

3. A platen as claimed in claim 2, wherein the electrostatic electrode also constitutes the RF electrode.

4. A platen as-claimed in claim 1, wherein the body incorporates a heating element.

5. A platen as claimed in claim 4, wherein the heating element constitutes the RF electrode.

6. A platen as claimed in claim 4, further comprising a temperature sensor disposed in the body.

7. A platen as claimed in claim 1, wherein the body has voids or tubes extending therethrough to allow cooling of the body.

8. A platen as claimed in claim 1, wherein at least portion of the base is open or absent to expose the ground plane electrode.

9. A platen as claimed in claim 8, wherein an electrical connection to the ground plane electrode is made directly to an exposed area by a tubular connector through which other connections may pass.

10. A platen as claimed in claim 1, wherein an electrical contact for the RF electrode is disposed at the peripheral edge of the platen.

11. A platen as claimed in claim 10, wherein the body above the RF electrode is less wide than the remainder to expose a portion of the RF electrode to allow the electrical contact to sit on the exposed platen.

12. A platen as claimed in claim 1, wherein the body defines or contains an inlet for process gas, which debouches at the peripheral edge of the body.

13. A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;

an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto; and

a ground plane electrode disposed in the body between the RF electrode and the base, wherein an electrical contact for the ground plane electrode is disposed at the peripheral edge of the platen.

14. A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;

an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto; and

a ground plane electrode disposed in the body between the RF electrode and the base, wherein an electrical contact for the ground plane electrode is disposed at the peripheral edge of the platen, and wherein the body above the ground plane electrode is less wide than the remainder to expose a portion of the ground plane electrode to allow the electrical contact to sit on the exposed portion.