×

Angular rate sensor made from a structural wafer of single crystal silicon

  • US 6,189,381 B1
  • Filed: 04/26/1999
  • Issued: 02/20/2001
  • Est. Priority Date: 04/26/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. An angular rate sensor comprising:

  • a structural wafer composed of single crystal silicon and having a pair of proof masses which are part of a rotating reference frame, said masses lying substantially in an X-Y plane orthogonal to a Z input axis of rotation;

    interdigitated means included in said structural wafer for driving said masses into oscillation in an X or Y direction;

    frame means included in said structural wafer in said X-Y plane for supporting said masses and allowing opposing Coriolis induced forces to rotate said frame, the rotation of said frame being indicative of said angular rate of said sensor;

    parallel plate sensing means located outside of said frame also in said X-Y plane for sensing said rotation of said frame.

View all claims
  • 9 Assignments
Timeline View
Assignment View
    ×
    ×