Dual stage pump system with pre-stressed diaphragms and reservoir
First Claim
1. A liquid delivery system for delivering filtered liquid in precise amounts in the fabrication of electronic components comprising:
- at least one dispensing pump and at least one supply pump, a filter through which said at least one supply pump pushes liquid, at least one filtered liquid reservoir from which said at least one dispensing pump obtains filtered liquid, said filtered liquid reservoir having a sensor for detecting the level of liquid in said reservoir, a controller which sends signals to operate said at least one supply pump based upon input from said sensor, wherein said at least one supply pump and said at least one dispensing pump are compatible for pumping viscous fluids at precise dispensing rates.
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Accused Products
Abstract
An improved dual-stage pump system is provided for the accurate pumping and filtering of viscous fluids. Two hydraulically activated pumps are provided in series with a filter and reservoir disposed in-line between the two pumps. The reservoir acts as a source bottle for the second pump and allows the first pump to pump the viscous fluid through the filter at a rate independent of the dispensing rate of the second pump. By operating the first pump at a rate independent of the second pump, back pressure at the filter is avoided. Each hydraulically activated diaphragm pump is equipped with an improved diaphragm that is pre-formed to the geometries of the process fluid cavity thereby eliminating any inaccuracies in the operation of the pumps due to expansion of retraction of the diaphragm during pump operation.
85 Citations
7 Claims
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1. A liquid delivery system for delivering filtered liquid in precise amounts in the fabrication of electronic components comprising:
- at least one dispensing pump and at least one supply pump, a filter through which said at least one supply pump pushes liquid, at least one filtered liquid reservoir from which said at least one dispensing pump obtains filtered liquid, said filtered liquid reservoir having a sensor for detecting the level of liquid in said reservoir, a controller which sends signals to operate said at least one supply pump based upon input from said sensor, wherein said at least one supply pump and said at least one dispensing pump are compatible for pumping viscous fluids at precise dispensing rates.
- View Dependent Claims (2, 3, 4)
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5. A method of delivering filtered viscous liquid in precise amounts in the fabrication of electronic components comprising:
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withdrawing liquid from a source container;
using a supply pump to push said liquid through a filter;
holding filtered liquid in a filtered liquid reservoir;
using a plurality of dispense pumps to withdraw liquid from said filtered liquid reservoir; and
using said plurality of dispense pumps to dispense said filtered liquid. - View Dependent Claims (6, 7)
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Specification