Magnetoresistive sensor for high precision measurements of lengths and angles

• US 6,191,578 B1
• Filed: 05/07/1998
• Issued: 02/20/2001
• Est. Priority Date: 05/09/1997
• Status: Expired due to Term

• Current Assignee: Tesa Sa (Hexagon AB)
• Original Assignee: Brown & Sharpe Tesa Sa (Hexagon AB)
• Inventors: Bezinge, Alex, Bolli, Jean-Luc
• Primary Examiner(s): Oda, Christine K.
• Assistant Examiner(s): Zaveri, Subhash
• Application Number:
  US09/073,792
• Time in Patent Office: 1,020 Days
• Field of Search: 324/326, 324/207.21, 324/207.12, 324/207.19, 324/207.24, 324/207.25, 324/252, 324/690, 356/72, 366/113
• US Class Current: 324/207.21
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G01R 33/096 anisotropic magnetoresistance sensors

Abstract

A sensor for measuring linear or angular dimension. The sensor can be moved with respect to a magnetized scale with a period λ. It is equipped with magnetoresistive electrodes provided with barber-pole structures and connected so as to form n measuring bridges, each measuring bridge formed by four sets of magnetoresistive electrodes.

The magnetoresistive electrodes making up each set are connected in series, the magnetoresistive electrodes being distributed spatially so as to constitute x groups. Each group being formed by more than eight consecutive magnetoresistive electrodes coming from two sets of a same measuring bridge.

Claims

1. A sensor intended to be moved with respect to a magnetized scale with a period λ

for measuring linear or angular dimensions, said sensor comprising;

magnetoresistive electrodes connected to form n measuring bridges, each said measuring bridge being formed by four branches of magnetoresistive electrodes, the magnetoresistive electrodes making up each branch of said bridge being connected in series, the magnetoresistive electrodes being distributed longitudinally so as to constitute x groups, each said group being made up of y consecutive magnetoresistive electrodes coming from maximally two of said branches of a same said measuring bridge,

wherein the number of magnetoresistive electrodes per group is greater than eight.

2. The sensor according to claim 1, wherein at least certain magnetoresistive electrodes bear barber-pole structures.

3. The sensor according to claim 2, wherein the magnetoresistive electrodes of said groups come from two branches of said bridge and the centers of gravity of two branches of said bridge of magnetoresistive electrodes in a same group and their barber-pole structures are selected so that a same magnetic field coming from the scale induces an opposite resistance variation in the two branches of said bridge of magnetoresistive electrodes.

4. The sensor according to claim 3, wherein each said group includes a sequence with one magnetoresistive electrode of first branch in said group, two electrodes of the other branch in said group, two electrodes of the first branch in said group, and continuing.

5. The sensor according to claim 4, wherein the consecutive groups are phase shifted by 180°

/n.

6. The sensor according to claim 5, wherein each measuring bridge is made up of four branches of magnetoresistive electrodes coming from pairs of groups phase-shifted by 180°

.

7. The sensor according to claim 1, wherein each branch of said bridge has magnetoresistive electrodes coming from at least two groups of the same phase.

8. The sensor according to claim 2, wherein each branch of said bridge has magnetoresistive electrodes coming from at least two groups phase-shifted by 180°

and provided with barber-pole structures with opposite orientations.

9. The sensor according to claim 1, wherein the number n of measuring bridges is equal to two, and the number x of groups is a whole-number multiple of eight, and the magnetoresistive electrodes of each branch of said bridge come from at least two first groups of the same phase and with a barber-pole structure oriented in a first direction, and at least two second groups phase-shifted by 180°

with respect to said first groups and with a barber-pole structure oriented in a second direction, opposite to the first direction.

10. The sensor according to claim 9, wherein each measuring bridge is made up of four branches of said bridge of magnetoresistive electrodes, all the magnetoresistive electrodes of two branches being distributed in the first half of the electrodes whereas all the electrodes of two other branches are distributed in the second half of the electrodes.

11. The sensor according to claim 10, wherein the number x of groups is equal to 24.

12. The sensor according to claim 11, wherein the number y of magnetoresistive electrodes per group is equal to 24.

13. The sensor according to claim 1, wherein the period λ

is included in the interval {0.5 mm;

1.5 mm}.

14. The sensor according to claim 13, wherein the resulting resistance of each branch of magnetoresistive electrodes is greater than 10 KΩ

.

15. The sensor according to claim 14, wherein the magnetoresistive electrodes are distributed on at least four times the length of the period λ

.

16. A device for measuring dimension comprising a magnetized scale with a period of magnetization λ

and a sensor moving with respect to said scale, said sensor having magnetoresistive electrodes connected to form n measuring bridges, each said measuring bridge being formed by four branches of magnetoresistive electrodes, the magnetoresistive electrodes making up each branch of said bridge being connected in series, the magnetoresistive electrodes being distributed longitudinally so as to constitute x groups each made up of y consecutive magnetoresistive electrodes coming from maximally two branches of a same measuring bridge, wherein the number of magnetoresistive electrodes per group is greater than eight.

17. The measuring device according to claim 16, wherein the distance between the scale and the magnetoresistive electrodes is included in the interval {200 μ

m-700 μ

m}.

18. The device according to claim 16, wherein it is battery-powered.

19. A sensor for measuring linear or angular dimensions, said sensor comprising:

a plurality of measuring bridges for making high precision measurements;

a plurality of magnetoresistive electrodes for forming said plurality of measuring bridges and providing resistance;

at least four branches of said plurality of measuring bridges, each said branch arranging said plurality of magnetoresistive electrodes in series connection for increasing resistance; and

a plurality of groups, each said plurality of groups having some of said plurality of magnetoresistive electrodes from two of said at least four branches of said plurality of measuring bridges.

20. The sensor according to claim 19, wherein said some of said plurality of magnetoresistive electrodes have barber-pole structures of magnetic fields slanted one way and said some of said plurality of magnetoresistive electrodes have barber-pole structures of magnetic fields slanted the other way.