Methods and apparatus for high speed longitudinal scanning in imaging systems
First Claim
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1. An apparatus, comprising:
- an interferometer which receives broadband light and outputs a reference output signal and a probe signal directed to a sample which produces a sample return signal;
an optical path-length scanning unit which receives the reference output signal from the interferometer and outputs a reference return signal to said interferometer, said interferometer combining the reference return signal and the sample return signal and outputting an interferometer output signal;
a detector unit which receives the interferometer output signal and outputs a detector output signal;
a scan analyzer and correction unit coupled to said detector unit that receives the detector output signal; and
a scanning unit controller coupled to an optical path-length scanning unit, said scanning unit controller controls said optical path-length scanning unit and outputs a controller signal to said scan analyzer and correction unit, wherein said scan analyzer and correction unit analyzes the controller signal and the detector output signal and determines scan correction information.
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Abstract
An imaging system wherein an optical signal is transmitted to both a sample to be measured and a rotating element which is calibrated to the system. A return signal is detected by the system, and a scan analyzer and correction unit uses the system calibration information along with synchronization information to correct for return signal degradation or errors due to imperfections in the rotating element in real time. This allows for an accurate measurement of the sample. The system can also include a coarse path-length adjustment unit to allow the system to track a region of interest within a sample to further allow for accurate sample measurement.
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Citations
23 Claims
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1. An apparatus, comprising:
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an interferometer which receives broadband light and outputs a reference output signal and a probe signal directed to a sample which produces a sample return signal;
an optical path-length scanning unit which receives the reference output signal from the interferometer and outputs a reference return signal to said interferometer, said interferometer combining the reference return signal and the sample return signal and outputting an interferometer output signal;
a detector unit which receives the interferometer output signal and outputs a detector output signal;
a scan analyzer and correction unit coupled to said detector unit that receives the detector output signal; and
a scanning unit controller coupled to an optical path-length scanning unit, said scanning unit controller controls said optical path-length scanning unit and outputs a controller signal to said scan analyzer and correction unit, wherein said scan analyzer and correction unit analyzes the controller signal and the detector output signal and determines scan correction information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 22)
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19. An apparatus, comprising:
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an interferometer which receives broadband light and outputs a reference output signal and a probe signal directed to a sample which produces a sample return signal;
a rotating optical path-length scanning unit which receives the reference output signal and outputs a reference return signal to said interferometer, said interferometer combining the reference return signal and the sample return signal and outputting an interferometer output signal;
a detector unit for receiving the interferometer output signal and outputting a detector output signal;
scan analyzer and correction unit coupled to said detector unit including an optical path-length position unit for receiving the detector output signal; and
scanning unit controller coupled to said rotating optical path-length scanning unit, for controlling said rotating optical path-length scanning unit and for outputting a controller signal to said scan analyzer and correction unit, wherein said scan analyzer and correction unit analyzes the controller signal and the detector output signal and determines scan correction information. - View Dependent Claims (21, 23)
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Specification