Optical system with a dielectric subwavelength structure having high reflectivity and polarization selectivity

• US 6,191,890 B1
• Filed: 03/31/1997
• Issued: 02/20/2001
• Est. Priority Date: 03/29/1996
• Status: Expired due to Term

• Current Assignee: IMEC International
• Original Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International), University of Kent
• Inventors: Dhoedt, Bart, Goeman, Stefan, Demeulenaere, Bart, Baets, Roel
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US08/829,348
• Time in Patent Office: 1,422 Days
• Field of Search: 359/566, 359/569, 359/572, 359/558, 359/576
• US Class Current: 359/572
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength
• CPC Class Codes: G02B 5/1866 Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: H01S 5/18319 comprising a periodical structure in lateral directions
• CPC Class Codes: H01S 5/18355 having a defined polarisation
• CPC Class Codes: H01S 5/18386 Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface

Abstract

The present invention is related to a system for transferring a beam of electromagnetic radiation having a vacuum wavelength. The system according to the invention includes a first dielectric medium, a second dielectric medium and a dielectric layer in between the first and the second medium. The dielectric layer has a periodicity of the dielectric properties parallel to the layer. The periodicity has a period that is smaller than the wavelength of the electromagnetic radiation in the second dielectric medium.

Claims

1. A system for transferring a beam of electromagnetic radiation having a vacuum wavelength, said system comprising:

a first dielectric medium with a first refractive index n₁ wherein said beam can propagate;

a second dielectric medium with a second refractive index n₂; and

a dielectric region in between said first and said second medium, characterized in that said region has a periodicity of the dielectric properties parallel to said region, said periodicity having a period that is smaller than the wavelength of the electromagnetic radiation in said second dielectric medium, said dielectric properties and said periodicity of said dielectric region further being chosen such that the average refractive index of said dielectric region is not greater than said first refractive index n₁ and not less than said second refractive index n₂ and that the dielectric region establishes that said beam when incident on said dielectric region is reflected more than 90% into the specular zero-order reflection, said dielectric region further characterized in that said region has a sufficiently large variation of said dielectric properties within one repetition of said period such that said beam when incident on said dielectric region excites at least two modes propagating within said dielectric region along a direction normal thereto, and wherein at least one of the propagating modes is of higher order.

2. A system as recited in claim 1, characterized in that the at least two propagating modes within said dielectric region are perpendicular to said dielectric region.

3. A system as recited in claim 2, wherein said beam is substantially orthogonal incident on said dielectric region.

4. A system as recited in claim 1, wherein said dielectric region has a periodicity of the dielectric properties in a plurality of directions, said periodicity having a period for each of said directions that is smaller than the wavelength of the electromagnetic radiation in said second dielectric medium.

5. A system as recited in claim 1, wherein said dielectric region is a grating.

6. A system according to claim 5, wherein said grating is a grated surface structure of the second dielectric medium, said dielectric region being composed of the same material as said second medium.

7. A system according to claim 5, wherein said grating has a one dimensional periodicity (Λ

).

8. A system according to claim 5, characterized in that the incident beam is TM-polarized.

9. A system according to claim 5, characterized in that the incident beam is TE-polarized.

10. A system according to claim 9, wherein said grating has a substantially rectangular cross section.

11. A system according to claim 5, wherein said grating has a grating filling factor (f) which is comprised between 40 and 60%.

12. A system according to claim 5, wherein the second medium referred to the propagating direction of said beam is formed by air or vacuum with a second refractive index n₂ approximately equal to unity.

13. A system according to claim 5, wherein the arrangement thereof is such that the angle of incidence of the incident beam is substantially normal to the grating.

14. A system according to claim 1, wherein the first refractive index n₁ is chosen so as to be comprised within a range between 3 and 4.

15. A system according to claim 1, characterized in that said refractive index n₁ and said refractive index n₂ are complex numbers with substantially small imaginary parts.

16. A system according to claim 1, wherein said dielectric region is used as a mirror.

17. A system according to claim 16, wherein said mirror comprises a highly reflective, substantially rectangular, one-dimensional grating.

18. A system according to claim 17, wherein said grating is provided with substantially linear grooves from a homogeneous medium with refractive index n₁ and wherein the selection of the grating period is such that coupling to higher orders in transmission is suppressed, wherein the at least two propagating modes includes two forward propagating modes and two back propagating modes, wherein the grating thickness is selected such that the two forward propagating modes within said dielectric region and perpendicular to said dielectric region are, after propagation through the grating, in anti-phase, the two back propagating modes interfering constructively with the primary reflection, and the total reflected field exhibiting a constant phase.

19. A system as recited in claim 18, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being visible light.

20. A system as recited in claim 18, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being infrared light.

21. A system as recited in claim 18, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being ultraviolet light.

22. A system as recited in claim 21, wherein said laser is a vertical cavity surface emitting laser (VCSEL).

23. A system for transferring a beam of electromagnetic radiation having a vacuum wavelength, said system comprising:

a first dielectric medium with a first refractive index n₁ wherein said beam can propagate;

a second dielectric medium with a second refractive index n₂; and

a dielectric region in between said first and said second medium, characterized in that said region is a grating having a periodicity of the dielectric properties parallel to said region, said periodicity having a period that is smaller than the wavelength of the electromagnetic radiation in said second dielectric medium, said dielectric properties and said periodicity of said dielectric region further being chosen such that the average refractive index of said dielectric region is not greater than said first refractive index n₁ and not less than said second refractive index n₂ and that the dielectric region establishes that said beam when incident on said dielectric region is reflected for essentially 100% into the specular zero-order reflection, said dielectric region further characterized in that said region has a sufficiently large variation of said dielectric properties within one repetition of said period such that said beam when incident on said dielectric region excites at least two modes propagating within said dielectric region along a direction normal thereto, wherein the arrangement thereof is such that the angle of incidence of the incident beam is substantially normal to the grating and further characterized in that the grating parameters are chosen so that the reflection and transmission behavior of said system provides minimized zero order transmission in conjunction with maximized zero order reflection and wherein said grating parameters are generated by the following expressions $\begin{array}{c}\frac{\mathrm{\Lambda <br><br>}}{\mathrm{\lambda <br><br>}}=\frac{2}{\sqrt{n_1^2-1}}\\ n_{0,\mathrm{eff}}=\sqrt{n_1^2-{\left(\frac{\mathrm{\lambda <br><br>}}{\mathrm{\Lambda <br><br>}}\right)}^2}\\ \frac{d}{\mathrm{\lambda <br><br>}}=\frac{3}{2<br><br>\left(2<br><br>n_{0,\mathrm{eff}}-1\right)}\\ f=50<br><br>\text{\hspace{1em}<br><br>}<br><br>\%\end{array}$

wherein

n_0,eff=effective index of a first propagating mode in the grating region,

λ

=vacuum wavelength,

Λ

=grating periodicity,

f=a grating filling factor,

d=grating depth.

24. A system for transferring a beam of electromagnetic radiation having a vacuum wavelength, said system consisting essentially of:

a first dielectric medium with a first refractive index no wherein said beam can only propagate in said first dielectric medium;

a second dielectric medium with a second refractive index n₂; and

a dielectric region in between said first and said second medium, characterized in that said region has a periodicity of the dielectric properties parallel to said region, said periodicity having a period that is smaller than the wavelength of the electromagnetic radiation in said second dielectric medium, said dielectric properties and said periodicity of said dielectric region further being chosen such that the average refractive index of said dielectric region is not greater than said first refractive index n₁ and not less than said second refractive index n₂ and that their refractive index values cooperatively establish that said beam when incident on said dielectric region is reflected more than 90% into the specular zero-order reflection.

25. A system as recited in claim 24, characterized in that said dielectric region has a sufficiently large variation of said dielectric properties within one repetition of said period such that said beam when incident on said dielectric region exciter at least two propagating modes within said dielectric region and perpendicular to said dielectric region and wherein at least one of the propagating modes is of higher order.

26. A system as recited in claim 25 wherein said beam is substantially orthogonal incident on said dielectric region.

27. A system as recited in claim 24 wherein said dielectric region has a periodicity of the dielectric properties in a plurality of directions, said periodicity having a period for each of said directions that is smaller than the wavelength of the electromagnetic radiation is said second dielectric medium.

28. A system as recited in claim 24, wherein said dielectric region is a grating.

29. A system according to claim 28, wherein said grating is a grated surface structure of the second dielectric medium, said dielectric region being composed of the same material as said second medium.

30. A system according to claim 28, wherein said grating has a one dimensional periodicity (Λ

).

31. A system according to claim 28, characterized in that the incident beam is TM-polarized.

32. A system according to claim 28, characterized in that the incident beam is TE-polarized.

33. A system according to claim 32, wherein said grating has a substantially rectangular cross section.

34. A system according to claim 28, wherein said grating has a grating filling factor (f) which is comprised between 40 and 60%.

35. A system according to claim 28, wherein the second medium referred to the propagating direction of said beam is formed by air or vacuum with a second refractive index n₂ approximately equal to unity.

36. A system according to claim 28, wherein the arrangement thereof is such that the angle of incidence of the incident beam is substantially normal to the grating.

37. A system according to claim 36, characterized in that the grating parameters are chosen so that the reflection and transmission behavior of said system provides minimized zero order transmission in conjunction with maximized zero order reflection and wherein said grating parameters are generated by the following expressions $\begin{array}{c}\frac{\Lambda }{}\end{array}$

λ

=2n12-1n0,eff=n12-(λ

Λ

)2dλ

=32

(2

n0,eff-1)f=50

 



%

wherein

n_0,eff=effective index of a propagating mode in the grating region,

λ

=vacuum wavelength,

Λ

=grating periodicity,

f=a grating filling factor,

d=grating depth.

38. A system according to claim 24, wherein the first refractive index n₁ is chosen so as to be comprised within a range between 3 and 4.

39. A system according to claim 24, characterized in that said refractive index n₁ and said refractive index n₂ are complex numbers with substantially small imaginary parts.

40. A system according to claim 24 wherein said dielectric region is used as a mirror.

41. A system according to claim 40, wherein said mirror comprises a highly reflective, substantially rectangular, one-dimensional grating.

42. A system according to claim 41, wherein said grating is provided with substantially linear grooves from a homogeneous medium with refractive index n₁ and wherein the selection of the grating period is such that coupling to higher orders in transmission is suppressed, wherein the at least two propagating modes includes two forward propagating modes and two back propagating modes, wherein the grating thickness is selected such that the two forward propagating modes within said dielectric region and perpendicular to said dielectric region are, after propagation through the grating, in anti-phase, the two back propagating modes interfering constructively with the primary reflection, and the total reflected field exhibiting a constant phase.

43. A system as recited in claim 42, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being visible light.

44. A system as recited in claim 42, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being infrared light.

45. A system as recited in claim 42, wherein said dielectric region is one of the mirrors in a laser cavity, said electromagnetic radiation being ultraviolet light.

46. A system as recited in claim 42, wherein said grating defines a first interface and a second interface wherein said two backward propagating modes are interfering constructively at said first interface and said two forward propagating modes are in anti-phase at said second interface.

47. A system as recited in claim 24, wherein the beam propagating in the first dielectric medium includes at least one higher order mode.

49. A system as recited in claim 46, wherein the beam can only propagate in the first dielectric medium.

48. A system for transferring a beam of electromagnetic radiation having a vacuum wavelength, said system consisting essentially of:

a first dielectric medium with a first refractive index n₁ wherein said beam can propagate;

a second dielectric medium with a second refractive index n₂; and

a dielectric region in between said first and said second medium, characterized in that said region has a periodicity of the dielectric properties parallel to said region, said periodicity having a period that is smaller than the wavelength of the electromagnetic radiation in said second dielectric medium, said dielectric properties and said periodicity of said dielectric region further being chosen such that the average refractive index of said dielectric region is not greater than said first refractive index n₁ and not less than said second refractive index n₂ and that their refractive index values cooperatively establish that said beam when perpendicularly incident to said dielectric region is reflected more than 90% into the specular zero-order reflection, wherein said dielectric region has a sufficiently large variation of said dielectric properties within one repetition of said period such that said beam when incident on said dielectric region excites at least two higher order modes propagating within said dielectric region along and incident path.