Beam alignment correction element assembly
First Claim
1. A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, comprising:
- a housing having a correction element fixedly mounted therein and moveable therewith;
a member having a first portion and a second portion;
a first piezo element mounted to the first portion of the member and to said housing and configured to move said housing in a first direction; and
a second piezo element mounted to the second portion of the member and to a base, and configured to move said housing in a second direction substantially perpendicular to said first direction;
wherein said correction element has a beam axis and said movement of said housing causes said correction element to move substantially orthogonal to said beam axis.
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0 Petitions
Accused Products
Abstract
A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.
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Citations
13 Claims
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1. A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, comprising:
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a housing having a correction element fixedly mounted therein and moveable therewith;
a member having a first portion and a second portion;
a first piezo element mounted to the first portion of the member and to said housing and configured to move said housing in a first direction; and
a second piezo element mounted to the second portion of the member and to a base, and configured to move said housing in a second direction substantially perpendicular to said first direction;
wherein said correction element has a beam axis and said movement of said housing causes said correction element to move substantially orthogonal to said beam axis. - View Dependent Claims (2, 3, 4, 5, 6, 7)
each of the first and the second portions of the member have first and second opposite side surfaces, with the first side surface facing said housing;
the first piezo element is mounted to the first side surface of the first portion of the member; and
the second piezo element is mounted to the second side surface of the second portion of the member.
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4. A correction element assembly according to claim 1, further comprising a reticule mounted to and moveable with said housing for encoding movement of said housing.
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5. A correction element assembly according to claim 1, further comprising a reticule mounted to and moveable with said housing for monitoring movement of said housing.
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6. A correction element assembly according to claim 1, further comprising:
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a first reticule mounted to and moveable with said housing;
a second reticule mounted so as to be stationary with respect to said first reticule;
a reference radiation emitter, mounted so as to be stationary with respect to said first reticule, for emitting a reference beam of radiation on a path passing through said reticules;
a detector, mounted so as to be stationary with respect to said first reticule, for detecting radiation from the reference beam downstream of said reticules and generating signals representing movement of said housing.
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7. A correction element assembly according to claim 1, wherein the correction element is configured such that the beam of radiation will pass through the correction element on a path substantially parallel to the beam axis.
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8. A correction element assembly for correcting alignment of a beam of radiation, comprising:
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a correction element;
a first piezo element connected to the correction element at a first point; and
a second piezo element connected to the correction element at a second point;
wherein the first and the second piezo elements are configured to move the correction element in substantially orthogonal directions; and
wherein the correction element has a beam axis, and the first and the second piezo elements are configured to cause the correction element to move substantially orthogonal to the beam axis. - View Dependent Claims (9, 10, 11, 12, 13)
the first and the second piezo elements are configured to move the correction element in a cyclic fashion substantially about the beam axis.
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10. A correction element assembly according to claim 8, wherein:
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the first piezo element is mounted to a first surface of a member, and the first surface faces the correction element; and
the second piezo element is mounted to the second surface of the member, and the second surface faces away from the correction element.
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11. A correction element assembly according to claim 8, further comprising:
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a first reticule moveable with the correction element;
a second reticule which remains stationary with respect to said first reticule;
a reference radiation beam emitter disposed so as to direct a reference beam of radiation on a path passing through the first and the second reticules; and
a detector disposed so as to detect radiation from the reference beam downstream of the first and the second reticules.
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12. A correction element assembly according to claim 8, wherein the second point is angularly disposed from the first point by an angle other than 0°
- and 180°
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- and 180°
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13. A correction element assembly according to claim 8, wherein the correction element is configured such that the beam of radiation will pass through the correction element on a path substantially parallel to the beam axis.
Specification