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Monolithic micromechanical apparatus with suspended microstructure

  • US 6,192,757 B1
  • Filed: 12/06/1999
  • Issued: 02/27/2001
  • Est. Priority Date: 08/17/1990
  • Status: Expired due to Fees
First Claim
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1. A monolithic capacitance-type acceleration sensor comprising first and second capacitors, each having first and second electrodes, in each of the capacitors, a first one of the electrodes being movable relative to a second one of the electrodes in response to applied acceleration, characterized by;

  • said first electrode of said first capacitor being connected electrically to said first electrode of said second capacitor, forming a differential capacitor arrangement, the electrodes all being formed of polysilicon members suspended above a silicon substrate, and resolving circuitry on said substrate and coupled to said electrodes for generating in response to movement of said movable first electrodes, a signal indicative of acceleration.

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