Airflow control valve for a clean room

• US 6,192,922 B1
• Filed: 06/01/1999
• Issued: 02/27/2001
• Est. Priority Date: 06/01/1999
• Status: Expired due to Fees

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Synetics Solutions, Inc. (Azenta, Inc.)
• Inventors: MacGibbon, Bruce S., Sirovy, Christopher P., Yarroll, Jeffrey W., Wolochuk, Mark C., Wolochuk, Lee I., LeBaron, James F.
• Primary Examiner(s): Michalsky, Gerald A.
• Application Number:
  US09/323,591
• Time in Patent Office: 637 Days
• Field of Search: 137/486, 137/625.31, 137/630.21, 137/630.22, 251/65, 454/61
• US Class Current: 137/486
• CPC Class Codes: F16K 3/085 the axis of supply passage and the axis of discharge passage being coaxial and parallel to the axis of rotation of the plates
• CPC Class Codes: F24F 2013/148 with magnets
• CPC Class Codes: F24F 2110/30 Velocity
• CPC Class Codes: F24F 3/167 Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed air distribution by perforated walls F24F7/10
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/86743 Rotary
• CPC Class Codes: Y10T 137/87032 Rotary concentric valves
• CPC Class Codes: Y10T 137/8704 First valve actuates second valve

Abstract

An airflow control valve for a clean room having a duct section with a damper positioned within the duct. The damper being capable of an adjustment from an open position to a closed position. The opening and closing of the duct is accomplished through a magnetic coupling such that the duct can remain sealed during operation. The airflow control valve includes a sensor for measuring the airflow rate, so that the duct can be adjusted to maintain one or more predetermined flow rate set-points.

Claims

1. An airflow control valve comprising:

at least a portion of an air flow duct;

a damper positioned within the duct;

at least one magnet connected to the damper; and

a magnetic damper actuator positioned outside the duct such that movement of the actuator causes a corresponding movement of the damper, thereby actuating the damper to adjust the airflow through the duct;

wherein the damper is comprised of a plurality of rotatable plates, each plate having at least one airflow opening, wherein the plates are coupled together in a manner so that the rotary actuation of one plate may cause another plate to rotate, in a manner so that the plates cooperatively adjust the open area for airflow through the valve.

2. The valve of claim 1, further comprising a device for measuring the volumetric flow rate of air through the duct and a controller that actuates the damper in response to changes in the volumetric flow rate in such a way so as to maintain the volumetric flow rate at a predetermined level.

3. The valve of claim 2, further comprising a display panel that displays the volumetric flow rate.

4. The valve of claim 2, further comprising a communication system capable of transmitting data related to the valve, including volumetric airflow rate, to a remote location.

5. The valve of claim 2, wherein the flow rate measurement device comprises a plurality of pressure taps connected to a pressure transducer coupled to a programmable logic controller.

6. An airflow control device comprising:

an adjustable damper that restricts the airflow through a duct;

a means for adjusting the amount of airflow restriction created by the damper;

a means for determining the volumetric flow rate of air through a region of the duct; and

a controller that automatically adjusts the amount of airflow restriction caused by the damper by a predetermined amount in response to a measured change in the volumetric flow rate;

wherein the damper comprises a plurality of plates each having at least one airflow opening, the plates being rotatable coupled together in a manner so that the rotary actuation of one plate may cause another plate to rotate, in a manner so that the plates cooperatively adjust the open area for airflow through the valve.

7. The airflow device of claim 6, wherein all components in contact with the airflow are resistant to chemicals present in the airflow.