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Multi-function chamber for a substrate processing system

  • US 6,193,507 B1
  • Filed: 02/10/2000
  • Issued: 02/27/2001
  • Est. Priority Date: 05/20/1998
  • Status: Expired due to Term
First Claim
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1. An evacuable chamber, comprising:

  • a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber;

    wherein the chamber is configurable using removable components in at least two of the following configurations;

    a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures; and

    wherein when configured in the base configuration, the chamber further includes at least one removable volume reducing element disposed therein, when configured in the heating configuration, the chamber further includes an upper heating assembly and a heating platen, and when configured in the cooling configuration, the chamber further includes an upper cooling assembly and a cooling platen.

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