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Method for making high refractive index (HRI) film by adjusting the flow rate of a vaporized material

  • US 6,194,031 B1
  • Filed: 04/21/1999
  • Issued: 02/27/2001
  • Est. Priority Date: 06/04/1997
  • Status: Expired due to Fees
First Claim
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1. A method of depositing a layer of a depositing material onto a film by forming a deposition vapor from the deposition material, comprising:

  • providing an apparatus comprising;

    (a) a vacuum chamber;

    (b) a feed roll, disposed within the vacuum chamber and around which a polymer film is disposed;

    (c) a take-up roll, disposed within the vacuum chamber, the polymer film extending from the feed roll to the take-up roll and being moveable from the feed roll to the take up roll as the deposition vapor is deposited on the polymer film;

    (d) a vaporizer, disposed below the feed roll and the take-up roll, the vaporizer having (i) a flexible wall that defines a cavity in which the deposition material is heated to form the vapor for depositing on the polymer film as the polymer film is moved from the feed roll to the take-up roll, (ii) a first lip extending outward from a first side of the flexible wall and (iii) a second lip extending outward from a second side of the flexible wall, the first lip and the second lip being separated to define an aperture through which the deposition vapor flows when the deposition material is vaporized, a size of the aperture being adjustable by adjusting the distance of separation between the first lip and the second lip; and

    (e) a heat source in thermal communication with the vaporizer that is operable to transfer heat through the vaporizer to the deposition material to form the deposition vapor;

    adjusting the aperture to a desired cross-sectional opening by adjusting the distance of separation between the first lip and the second lip to thereby provide a desired rate of flow of vaporized deposition material from the vaporizer;

    heating the vaporizer and the deposition material to produce a vapor; and

    transferring film from a feed roll to a take up roll and passing the film near the aperture so that the vapor can deposit on the film as the film is being transferred.

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