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Method of fabrication of an infrared radiation detector and infrared detector device

  • US 6,194,722 B1
  • Filed: 03/27/1998
  • Issued: 02/27/2001
  • Est. Priority Date: 03/28/1997
  • Status: Expired due to Term
First Claim
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1. A method of fabricating an infrared sensitive bolometer, comprising the steps of:

  • forming a sacrificial layer on a substrate;

    patterning said sacrificial layer;

    simultaneously establishing an active layer and at least two connectors, the connectors electrically contacting the active layer with circuitry on the substrate, the active layer and the connectors consisting essentially of a single material on said sacrificial layer; and

    removing the sacrificial layer.

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