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Electronic component having gaps between conductive thin films

  • US 6,195,249 B1
  • Filed: 07/15/1999
  • Issued: 02/27/2001
  • Est. Priority Date: 03/17/1997
  • Status: Expired due to Term
First Claim
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1. An electronic component comprising a first conductive thin film, a dielectric thin film formed on the first conductive thin film, and a second conductive thin film formed on the dielectric thin film,wherein a third conductive thin film having an electric potential approximately equal to that of the second conductive thin film is formed approximately in a same surface on which the first conductive thin film is formed, an insulating region being interposed between the first conductive thin film and the third conductive thin film, and a fourth conductive thin film having an electric potential approximately equal to that of the first conductive thin film is formed approximately in the same surface on which the second conductive thin film is formed, an insulating region being interposed between the second conductive thin film and the fourth conductive thin film, and a gap between the first conductive thin film and the third conductive thin film and a gap between the second conductive thin film and the fourth conductive thin film are not less than 500 times a thickness of the dielectric thin film.

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