Non-invasive system and method for diagnosing potential malfunctions of semiconductor equipment components

• US 6,195,621 B1
• Filed: 02/09/1999
• Issued: 02/27/2001
• Est. Priority Date: 02/09/1999
• Status: Expired due to Term

• Current Assignee: Roger L. Bottomfield
• Original Assignee: Roger L. Bottomfield
• Inventors: Bottomfield, Roger L.
• Primary Examiner(s): Hoff, Marc S.
• Assistant Examiner(s): MILLER, CRAIG S
• Application Number:
  US09/247,143
• Time in Patent Office: 749 Days
• Field of Search: 702/33, 702/35, 702/36, 702/39, 702/56, 702/182, 702/183, 702/185, 702/189-195
• US Class Current: 702/183
• CPC Class Codes: G01H 1/003 of rotating machines G01H1/10 takes precedence
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

A system to diagnose potential malfunctions in semiconductor manufacturing equipment components, this system includes a transducer to monitor component vibration signatures of the semiconductor manufacturing equipment components. This transducer provides an output signal representative of the component vibration signature to an electrical circuit. The electrical circuit contains a transmitter which transmits via a carrier signal, a data signal representative of the output signal of the transducer. A computer system receives and stores the data signal. The computer system contains a software application to analyze the data signal and alert a user to differences between the data signal and a historical signal.

Claims

1. A system to diagnose potential malfunctions in semiconductor manufacturing equipment components, comprising:

a transducer to monitor present component vibration signatures of the semiconductor manufacturing equipment components and provide at least one output signal representative of present component vibration;

an electrical circuit to read said at least one output signal generated by said transducer and transmit at least one data signal representative of said present component vibration signatures to a computer system; and

a computer system which contains a software application to analyze said at least one data signal wherein said software application comprises;

a set of instructions operable to direct said computer to collect said at least one data signal, store data representative of said present vibration signatures in a memory location, and

compare said data to a database of historical component vibration signatures wherein an alert is supplied to a user noting differences between said present component vibration signatures and the historical component vibration signatures.

2. The system of claim 1, wherein said transducer comprises an accelerometer along an axis of concern.

3. The system of claim 1, wherein said electrical circuit further comprises a radio transmitter to transmit said at least one data signal to said computer, and wherein said computer system further comprises a radio receiver to receive said at least one data signal.

4. The system of claim 1, wherein the semiconductor manufacturing equipment component is a vacuum pump or vacuum system.

5. The system of claim 1, wherein said transducer is removably mounted to the semiconductor manufacturing equipment components external to any pressure boundaries of the semiconductor manufacturing equipment components.

6. The system of claim 1, wherein said database of historical component vibration signatures comprises a plurality of historical component vibration signatures representing different operating conditions of the semiconductor manufacturing equipment component.

7. The system of claim 1, wherein said software objects transforms said data representative of said present component vibration signatures and said historical component vibration signatures to spectrums of frequency and amplitude over time with a plurality of transformation techniques comprising:

fast fourier transforms;

wavelet transforms; and

gabor transforms.

8. The system of claim 1, wherein said software application utilizes a plurality of statistical techniques to compare present component vibration signatures and historical component vibration signatures comprising:

Euclidean distances between corresponding values of present and historical component vibration signatures; and

western electric rules.

9. The system of claim 1, wherein said transducer monitors vibrations between 0 and 20,000 hertz.

10. The system of claim 1, wherein said electrical circuit further comprises a filter to anti-alias said at least one data signal representative of said present component vibration signatures wherein said at least one data signal is an analog signal.

11. The system of claim 1, wherein each present and historical component vibration mechanical signature contains a unique component identifier, and wherein said computer collects said present component vibration signatures from a plurality of semiconductor manufacturing components for analysis.

12. The system of claim 1, wherein said computer is accessible from a local area network.

13. The system of claim 1, wherein said electrical circuit transmits said at least one data signal to said computer with a carrier electromagnetic signal of any kind.

14. A system to diagnose potential malfunctions in semiconductor manufacturing equipment components, comprising:

a transducer to monitor present component vibration signatures of the semiconductor manufacturing equipment components between 0 and 20,000 hertz, and provide at least one output signal representative of present component vibration, and wherein said transducer comprises an accelerometer removably mounted external to semiconductor manufacturing equipment components pressure boundaries of the semiconductor manufacturing equipment components along an exist of concern;

an electrical circuit to read said at least one output signal generated by said transducer, filter said at least one output signal to improve signal-to-noise ratio and transmit with an electromagnetic carrier signal of any kind at least one data signal representative of said present component vibration signatures to a computer system; and

a computer which contains a software application to analyze said at least one data signal representative of said present component vibration signatures wherein said software application comprises;

a memory module containing a database of historical component vibration signatures, and wherein comprises a plurality of historical component vibration signatures representing different operating conditions of semiconductor manufacturing equipment components;

a first module operable to direct said computer to collect said at least one data signal representative of said present component vibration signatures from said electrical circuit and store data representative of said present component vibration signatures in a memory location; and

a second module operable to compare said data representative of said present component vibration signatures to a database of historical component vibration signatures wherein an alert is supplied to a user noting differences between said present component vibration signatures and the historical component vibration signatures, and wherein said second software module transforms said data representative of said present component vibration signatures and said historical component vibration signatures to spectrums of frequency and amplitude over time with a plurality of transformation techniques comprising;

fast fourier transforms;

wavelet transforms; and

gabor transforms.

15. The system of claim 14, wherein said electrical circuit further comprises a radio transmitter to transmit said at least one data signal to said computer, and wherein said computer system further comprises a radio receiver to receive said at least one data signal.

16. The system of claim 14, wherein said software application utilizes a plurality of statistical techniques to compare present component vibration signatures and historical component vibration signatures comprising:

Euclidean distances between corresponding values of present and historical component vibration signatures; and

western electric rules.

17. A method for diagnosing potential malfunctions in semiconductor manufacturing equipment components, comprising the steps of:

monitoring component vibration signatures of the semiconductor manufacturing equipment components with a transducer wherein said transducer is an accelerometer removably mounted external to semiconductor manufacturing equipment components pressure boundaries along an axis of concern;

providing at least one output signal representative of present component vibration from said transducer to an electrical circuit;

reading said at least one output signal generated by said transducer with said electrical circuit;

filtering with said electrical circuit said at least one output signal to improve signal-to-noise ratio and provide a data signal representative of present component vibration;

transmitting on an electromagnetic carrier signal of any kind said data signal representative of said present component vibration signatures to a computer system;

receiving said data signal at said computer system;

storing said data signal in a memory location in said computer system;

transforming said data signal to spectrums of frequency and amplitude over time with a plurality of transformation techniques comprising;

fast fourier transforms;

wavelet transforms; and

gabor transforms;

comparing said spectrums to a historical spectrum of the semiconductor equipment component; and

alerting a user to potential malfunctions of the semiconductor equipment component based on differences between said spectrums and said historical spectrum.

18. The method of claim 17, wherein the step of comparing said spectrums further comprises the steps of:

selecting said historical spectrum from a historical database of spectrums for the semiconductor equipment component, and wherein said historical spectrum selected was recorded under similar operating conditions; and

comparing said spectrum and said historical spectrum with a plurality of statistical techniques comprising;

Euclidean distances between corresponding values of present and historical component vibration signatures; and

western electric rules.

19. The method of claim 17, wherein the step of transmitting on an electromagnetic carrier signal of any kind said data signal further comprises using a radio transmitter to transmit said electromagnetic carrier signal.

20. The method of claim 17, wherein said computer system receives a plurality of data signals representing vibration signatures from a plurality of semiconductor of semiconductor equipment components.