Graft polymers and use thereof
First Claim
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1. A solution of a graft polymer comprising a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is selected from the group consisting of titanium, zirconium, hafnium and mixtures thereof, and an alcohol solvent;
- wherein the alkoxy metallic compound further includes at least one member selected from the group consisting of silicon, tin and germanium.
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Abstract
Solutions of graft polymers of a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is titanium, zirconium and/or hafnium are useful as photoresist materials which are resistant to plasma. Also, compounds and graft polymers wherein the alkoxy metallic compound also contains silicon, tin or germanium are provided.
34 Citations
42 Claims
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1. A solution of a graft polymer comprising a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is selected from the group consisting of titanium, zirconium, hafnium and mixtures thereof, and an alcohol solvent;
- wherein the alkoxy metallic compound further includes at least one member selected from the group consisting of silicon, tin and germanium.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A solution of a graft polymer comprising a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound selected from the group consisting of zirconium tetrapentoxide;
- zirconium tetrahexoxide;
zirconium tetraheptoxide; and
hafnium ethylhexano-tert-butoxide.
- zirconium tetrahexoxide;
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40. A solution of a graft polymer comprising a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is selected from the group consisting of titanium, zirconium, hafnium and mixtures thereof, and an alcohol solvent;
- wherein the polymer is cotton or paper.
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41. A solution of a graft polymer comprising a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is selected from the group consisting of titanium, zirconium, hafnium and mixtures thereof, and an alcohol solvent;
- wherein the alkoxy metallic compound further includes a dye moiety.
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42. A graft polymer comprises a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is selected from the group consisting of titanium, zirconium, hafnium and mixtures thereof and further comprises at least one member selected from the group consisting of silicon, tin and germanium.
Specification