Bolometer including a reflective layer

• US 6,198,099 B1
• Filed: 09/03/1998
• Issued: 03/06/2001
• Est. Priority Date: 08/31/1998
• Status: Expired due to Fees

• Current Assignee: Dongbu Daewoo Electronics Corporation
• Original Assignee: Daewoo Electronics (Government of South Korea)
• Inventors: Kim, Dong Kyun
• Primary Examiner(s): Ham, Seungsook
• Assistant Examiner(s): PATTI, JOHN J
• Application Number:
  US09/146,254
• Time in Patent Office: 915 Days
• Field of Search: 250/338.1, 250/338.4, 250/339.11, 250/339.14, 250/370.01, 250/332, 250/342, 338/18, 338/15, 338/22.R
• US Class Current: 250/338.1
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Abstract

A infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having a pair of connecting terminals. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes an absorber with a reflective layer positioned at bottom surface thereof, a serpentine bolometer element surrounded by the absorber and an IR absorber coating formed top of the absorber. Since the reflective layer is attached at the bottom surface of the absorber, which will, in turn, eliminate the need for controlling the vertical distance between the absorption level and the active matrix level.

Claims

1. A three-level infrared bolometer comprising:

an active matrix level including a substrate and at least a pair of connecting terminals;

a support level provided with at least a pair of bridges, each of the bridges including an conduction line, one end of the conduction line being electrically connected to the respective connecting terminal;

an absorption level including an absorber with a reflective layer formed at a bottom surface thereof and a serpentine bolometer element surrounded by an absorber; and

at least a pair of posts being placed between the absorption level and the support level, each of the posts including an electrical conduit surrounded by an insulating material, wherein top end of the electrical conduit is connected to the absorption level and bottom end is electrically connected to the other end of the respective conduction line.

2. The bolometer of claim 1, wherein the reflective layer is attached at bottom of the absorber in the absorption level.

3. The bolometer of claim 1, wherein the reflective layer is made of a metal.

4. The bolometer of claim 3, wherein the reflective layer is made of aluminum (Al).

5. The bolometer of claim 1, wherein the absorption level further includes an IR absorber coating.

6. The bolometer of claim 5, wherein the IR absorber coating is placed on top of the absorber.

7. The bolometer of claim 6, wherein the IR absorber coating is made of black gold.