×

Method for fabricating an infrared radiation detector

  • US 6,198,100 B1
  • Filed: 11/22/1989
  • Issued: 03/06/2001
  • Est. Priority Date: 08/05/1987
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method for fabricating a device for detecting infrared radiation, comprising the steps of:

  • forming a plurality of groups of photosensitive segments in a planar array, said photosensitive segments being sensitive to said infrared radiation and said photosensitive segments having a thickness less than the wavelength of said infrared radiation, said photosensitive segments comprising a plurality of groups, each group having a plurality of said photosensitive segments positioned in an elongate pattern, the photosensitive segments in each group being offset from each other by less than said wavelength, and the lateral dimensions of each said photosensitive segments being less than said wavelength, forming a plurality of electrically conductive segments for interconnecting adjacent ones of said photosensitive segments in each of said groups, said electrically conductive segments not being photosensitive to said infrared radiation, whereby each group of said photosensitive segments together with the corresponding conductive segments is electrically conductive along its length, forming a plane which is reflective to said infrared radiation, said planar array of photosensitive segments and said infrared reflective plane being offset from each other by less than said wavelength, and electrically connecting a plurality of said groups of photosensitive segments in parallel to provide a conduction path for detection signals produced by said photosensitive segments in response to said infrared radiation.

View all claims
  • 6 Assignments
Timeline View
Assignment View
    ×
    ×