Acceleration sensor with ring-shaped movable electrode

• US 6,199,430 B1
• Filed: 02/02/1999
• Issued: 03/13/2001
• Est. Priority Date: 06/17/1997
• Status: Expired due to Term

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Hattori, Koji, Sugiura, Makiko, Ohtsuka, Yoshinori, Kano, Kazuhiko, Sakai, Minekazu, Toyoda, Inao, Murata, Minoru, Suzuki, Yasutoshi, Ishio, Seiichiro
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US09/241,137
• Time in Patent Office: 770 Days
• Field of Search: 735/140.1, 735/141.6, 735/143.2, 735/143.6, 735/143.8, 361/280
• US Class Current: 73/514.32
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 7/0006 Interconnects
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: G01V 1/181 Geophones
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009

Abstract

An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration.

Claims

1. An acceleration sensor comprising:

a substrate;

an anchor part fixedly disposed on the substrate;

a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;

a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a direction approximately parallel to a surface of the substrate by acceleration applied in the direction; and

a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode, the fixed electrode including a detecting fixed electrode for detecting the acceleration and a sensitivity controlling fixed electrode electrically insulated from the detecting fixed electrode for controlling sensitivity of the acceleration,

wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face; and

wherein first and second potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled.

2. The acceleration sensor of claim 1, further comprising a detecting circuit for detecting the acceleration based on the change in the interval between the movable electrode side face and the fixed electrode side face.

3. The acceleration sensor of claim 1, wherein the first potential difference between the movable electrode and the detecting fixed electrode is different from the second potential difference between the movable electrode and the sensitivity controlling fixed electrode.

4. The acceleration sensor of claim 1, wherein the movable electrode only contacts the detecting fixed electrode.

5. The acceleration sensor of claim 1, further comprising a lower electrode disposed on the substrate to face the movable electrode with an interval and having an electrical potential the same as that of the movable electrode.

6. The acceleration sensor of claim 1, wherein the detecting fixed electrode has a protrusion protruding from the fixed electrode side face to contact the movable electrode displaced by the acceleration and to prevent the movable electrode from contacting the sensitivity controlling fixed electrode.

7. The acceleration sensor of claim 6, wherein an electrostatic attracting force produced between the sensitivity controlling fixed electrode and the movable electrode is smaller than a spring restoring force of the beam when the movable electrode contacts the protrusion of the detecting fixed electrode.

8. The acceleration sensor of claim 6, wherein an interval between the protrusion and the movable electrode side face when no acceleration is applied to the movable electrode is fixed so that an electrostatic attracting force produced between the sensitivity controlling fixed electrode and the movable electrode is smaller than a spring restoring force of the beam when the movable electrode contacts the protrusion of the detecting fixed electrode.

9. The acceleration sensor of claim 8, wherein the interval between the protrusion and the movable electrode side face is fixed in a range where a value subtracted the electrostatic attracting force from the spring restoring force of the beam monotonically increases as the interval decreases by the displacement of the movable electrode.

10. The acceleration sensor of claim 8, wherein the interval between the protrusion and the movable electrode side face is fixed in a range where a value subtracted the electrostatic attracting force from the spring restoring force of the beam is positive.

11. The acceleration sensor of claim 10, wherein the interval between the protrusion and the movable electrode side face is fixed in a range where a value subtracted the electrostatic attracting force from the spring restoring force of the beam monotonically decreases as the interval decreases by the displacement of the movable electrode.

12. The acceleration sensor of claim 1, further comprising a deformation preventing film disposed on the beam on an opposite side of the substrate to prevent the beam from deforming in a gravitational direction.

13. The acceleration sensor of claim 12, wherein the deformation preventing film is disposed on the movable electrode on the opposite side of the substrate.

14. The acceleration sensor of claim 13, wherein the deformation preventing film generates tensile stress.

15. The acceleration sensor of claim 13, wherein the deformation preventing film is made of shape memory alloy.

16. The acceleration sensor of claim 1, wherein a thickness of the movable electrode is thinner than that of the anchor part.

17. The acceleration sensor of claim 16, wherein surfaces of the movable electrode, the beam, and the anchor part on an opposite side of the substrate are on a plane in a state where no gravitational force is applied to the movable electrode and the beam.

18. The acceleration sensor of claim 1, wherein a length of the movable electrode side face in a direction perpendicular to the surface of the substrate is smaller than that of the fixed electrode side face.

19. The acceleration sensor of claim 1, wherein one of the movable electrode side face and the fixed electrode side face has a protrusion for controlling sensitivity of the acceleration sensor.

20. The acceleration sensor of claim 19, wherein the protrusion is composed of a plurality of protrusions so that the movable electrode side face and the fixed electrode side face contact each other only through the protrusion.

21. The acceleration sensor of claim 1, further comprising a current preventing member disposed between the substrate and a movable part composed of the movable electrode and the beam, for preventing a current from flowing between the substrate and the movable part.

22. The acceleration sensor of claim 21, wherein the current preventing member is an insulation film disposed on at least one of surfaces of the substrate and the movable part facing one another.

23. The acceleration sensor of claim 1, wherein the anchor part, the movable electrode, and the beam are made of a metallic material.

24. The acceleration sensor of claim 1, wherein the substrate has a cavity open under the movable electrode and the beam.

25. The acceleration sensor of claim 1, wherein:

the movable electrode contacts the detecting fixed electrode when a magnitude of the acceleration applied to the movable electrode is larger than a specific magnitude; and

the movable electrode is kept in contact with the detecting fixed electrode after the magnitude of the acceleration is decreased.

26. The acceleration sensor of claim 25, wherein the movable electrode is kept in contact with the detecting fixed electrode when the acceleration disappears.

27. The acceleration sensor of claim 25, wherein an electrostatic attracting force is produced between the sensitivity controlling fixed electrode and the movable electrode to keep the movable electrode in contact with the detecting fixed electrode.

28. The acceleration sensor of claim 27, wherein the second potential difference between the sensitivity controlling fixed electrode and the movable electrode produces the electrostatic attracting force.

29. The acceleration sensor of claim 25, wherein:

the detecting fixed electrode has a protrusion; and

the movable electrode contacts the protrusion when the magnitude of the acceleration is larger than the specific magnitude.

30. The acceleration sensor of claim 1, wherein:

the fixed electrode includes a plurality of detecting fixed electrodes, and a plurality of sensitivity controlling fixed electrodes surrounding the movable electrode and insulated from the plurality of detecting fixed electrodes;

the second potential difference is applied between all of the plurality of sensitivity controlling fixed electrodes and the movable electrode to control the detecting sensitivity of the acceleration; and

a third potential difference different from the second potential difference is applied between at least one of the plurality of sensitivity controlling fixed electrodes and the movable electrode to check a detecting operation of the acceleration sensor.

31. The acceleration sensor of claim 30, further comprising a power supply for applying the second and third potential differences.

32. The acceleration sensor of claim 30, wherein the second potential difference is set at zero when the detecting operation is checked.

33. The acceleration sensor of claim 30, wherein:

the third potential difference produces a false acceleration which is applied to the movable electrode to displace the movable electrode; and

the false acceleration is detected based on the change in interval between the movable electrode side face and the fixed electrode side face so that the detecting operation of the acceleration sensor is checked.

34. The acceleration sensor of claim 30, wherein:

the plurality of detecting fixed electrodes are disposed to surround the movable electrode at a specific interval on an outer circumference side of the movable electrode;

the plurality of sensitivity controlling fixed electrodes are disposed between adjacent two of the plurality of detecting fixed electrodes, respectively; and

the third potential difference is applied between the movable electrode and adjacent two of the plurality of sensitivity controlling fixed electrodes with one of the plurality of detecting fixed electrodes interposed therebetween, and produces a false acceleration which is applied to the movable electrode to displace the movable electrode toward the one of the plurality of detecting fixed electrodes.

47. The acceleration sensor of claim 1, wherein;

the detecting fixed electrode has a detecting fixed electrode surface facing the movable electrode, the detecting fixed surface having a first area; and

the sensitivity controlling fixed electrode has a sensitivity controlling fixed electrode surface facing the movable electrode, the sensitivity controlling fixed electrode having a second area larger than the first area.

48. The acceleration sensor of claim 12, wherein a thickness of the beam in the gravitational direction is larger than a length of the beam in a direction perpendicular to the gravitational direction.

35. An acceleration sensor comprising:

a substrate having a substrate surface;

an anchor part fixedly disposed on the substrate surface;

a movable electrode suspending above the substrate;

a beam connecting the anchor part and the movable electrode and is elastically deformed by an acceleration produced in a parallel direction parallel to the substrate surface to displace the movable electrode in the parallel direction;

a fixed electrode fixedly disposed on the substrate surface, for contacting the movable electrode, when the movable electrode is displaced by the acceleration, to detect the acceleration; and

contacting state keeping means for keeping the movable electrode in contact with the fixed electrode after the acceleration disappears.

36. The acceleration sensor of claim 35, wherein:

the contacting state keeping means includes a sensitivity controlling electrode fixedly disposed on the substrate surface; and

an electrostatic attracting force is produced between the movable electrode and the sensitivity controlling electrode to keep the movable electrode in contact with the fixed electrode.

37. An acceleration sensor comprising:

a substrate;

an anchor part fixedly disposed on the substrate a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;

a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a first direction approximately parallel to a surface of the substrate by acceleration applied in the direction;

a deformation preventing film provided on the beam on an opposite side of the substrate to apply a force to the beam in a second direction opposite to a gravitational direction approximately perpendicular to the first direction; and

a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode,

wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face; and

wherein a length of the beam in the first direction is smaller than a thickness of the beam in the gravitational direction.

38. The acceleration sensor of claim 37, wherein the deformation preventing film generates stress that is applied to the beam in the direction opposite to the gravitational direction.

39. The acceleration sensor of claim 38, wherein the stress is tensile stress.

40. The acceleration sensor of claim 37, wherein the deformation preventing film generates stress for keeping the movable electrode approximately parallel to the surface of the substrate.

41. The acceleration sensor of claim 37, wherein the deformation preventing film is made of shape memory alloy.

42. The acceleration sensor of claim 37, wherein the deformation preventing film is disposed on the movable electrode on the opposite side of the substrate.

43. The acceleration sensor of claim 37, wherein a thickness of the movable electrode is thinner than that of the anchor part.

44. The acceleration sensor of claim 43, wherein surfaces of the movable electrode, the beam, and the anchor part on an opposite side of the substrate are on a plane in a state where no gravitational force is applied to the movable electrode and the beam.

45. The acceleration sensor of claim 37, wherein a length of the movable electrode side face in a direction perpendicular to the surface of the substrate is smaller than that of the fixed electrode side face.

46. An acceleration sensor comprising:

a substrate;

an anchor part fixedly disposed on the substrate;

a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;

a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a direction approximately parallel to a surface of the substrate by acceleration applied in the direction; and

a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode,

wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face;

wherein a thickness of the movable electrode is thinner than that of the anchor part; and

wherein surfaces of the anchor part, the beam, and the movable electrode on an opposite side of the substrate are on a plane in a state where no gravitational force is applied to the movable electrode and the beam.