Acceleration sensor with ring-shaped movable electrode
First Claim
1. An acceleration sensor comprising:
- a substrate;
an anchor part fixedly disposed on the substrate;
a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;
a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a direction approximately parallel to a surface of the substrate by acceleration applied in the direction; and
a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode, the fixed electrode including a detecting fixed electrode for detecting the acceleration and a sensitivity controlling fixed electrode electrically insulated from the detecting fixed electrode for controlling sensitivity of the acceleration, wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face; and
wherein first and second potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled.
1 Assignment
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Accused Products
Abstract
An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration.
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Citations
48 Claims
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1. An acceleration sensor comprising:
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a substrate;
an anchor part fixedly disposed on the substrate;
a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;
a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a direction approximately parallel to a surface of the substrate by acceleration applied in the direction; and
a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode, the fixed electrode including a detecting fixed electrode for detecting the acceleration and a sensitivity controlling fixed electrode electrically insulated from the detecting fixed electrode for controlling sensitivity of the acceleration, wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face; and
wherein first and second potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 47, 48)
the movable electrode contacts the detecting fixed electrode when a magnitude of the acceleration applied to the movable electrode is larger than a specific magnitude; and
the movable electrode is kept in contact with the detecting fixed electrode after the magnitude of the acceleration is decreased.
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26. The acceleration sensor of claim 25, wherein the movable electrode is kept in contact with the detecting fixed electrode when the acceleration disappears.
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27. The acceleration sensor of claim 25, wherein an electrostatic attracting force is produced between the sensitivity controlling fixed electrode and the movable electrode to keep the movable electrode in contact with the detecting fixed electrode.
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28. The acceleration sensor of claim 27, wherein the second potential difference between the sensitivity controlling fixed electrode and the movable electrode produces the electrostatic attracting force.
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29. The acceleration sensor of claim 25, wherein:
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the detecting fixed electrode has a protrusion; and
the movable electrode contacts the protrusion when the magnitude of the acceleration is larger than the specific magnitude.
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30. The acceleration sensor of claim 1, wherein:
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the fixed electrode includes a plurality of detecting fixed electrodes, and a plurality of sensitivity controlling fixed electrodes surrounding the movable electrode and insulated from the plurality of detecting fixed electrodes;
the second potential difference is applied between all of the plurality of sensitivity controlling fixed electrodes and the movable electrode to control the detecting sensitivity of the acceleration; and
a third potential difference different from the second potential difference is applied between at least one of the plurality of sensitivity controlling fixed electrodes and the movable electrode to check a detecting operation of the acceleration sensor.
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31. The acceleration sensor of claim 30, further comprising a power supply for applying the second and third potential differences.
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32. The acceleration sensor of claim 30, wherein the second potential difference is set at zero when the detecting operation is checked.
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33. The acceleration sensor of claim 30, wherein:
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the third potential difference produces a false acceleration which is applied to the movable electrode to displace the movable electrode; and
the false acceleration is detected based on the change in interval between the movable electrode side face and the fixed electrode side face so that the detecting operation of the acceleration sensor is checked.
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34. The acceleration sensor of claim 30, wherein:
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the plurality of detecting fixed electrodes are disposed to surround the movable electrode at a specific interval on an outer circumference side of the movable electrode;
the plurality of sensitivity controlling fixed electrodes are disposed between adjacent two of the plurality of detecting fixed electrodes, respectively; and
the third potential difference is applied between the movable electrode and adjacent two of the plurality of sensitivity controlling fixed electrodes with one of the plurality of detecting fixed electrodes interposed therebetween, and produces a false acceleration which is applied to the movable electrode to displace the movable electrode toward the one of the plurality of detecting fixed electrodes.
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47. The acceleration sensor of claim 1, wherein;
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the detecting fixed electrode has a detecting fixed electrode surface facing the movable electrode, the detecting fixed surface having a first area; and
the sensitivity controlling fixed electrode has a sensitivity controlling fixed electrode surface facing the movable electrode, the sensitivity controlling fixed electrode having a second area larger than the first area.
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48. The acceleration sensor of claim 12, wherein a thickness of the beam in the gravitational direction is larger than a length of the beam in a direction perpendicular to the gravitational direction.
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35. An acceleration sensor comprising:
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a substrate having a substrate surface;
an anchor part fixedly disposed on the substrate surface;
a movable electrode suspending above the substrate;
a beam connecting the anchor part and the movable electrode and is elastically deformed by an acceleration produced in a parallel direction parallel to the substrate surface to displace the movable electrode in the parallel direction;
a fixed electrode fixedly disposed on the substrate surface, for contacting the movable electrode, when the movable electrode is displaced by the acceleration, to detect the acceleration; and
contacting state keeping means for keeping the movable electrode in contact with the fixed electrode after the acceleration disappears. - View Dependent Claims (36)
the contacting state keeping means includes a sensitivity controlling electrode fixedly disposed on the substrate surface; and
an electrostatic attracting force is produced between the movable electrode and the sensitivity controlling electrode to keep the movable electrode in contact with the fixed electrode.
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37. An acceleration sensor comprising:
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a substrate;
an anchor part fixedly disposed on the substrate a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;
a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a first direction approximately parallel to a surface of the substrate by acceleration applied in the direction;
a deformation preventing film provided on the beam on an opposite side of the substrate to apply a force to the beam in a second direction opposite to a gravitational direction approximately perpendicular to the first direction; and
a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode, wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face; and
wherein a length of the beam in the first direction is smaller than a thickness of the beam in the gravitational direction. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45)
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46. An acceleration sensor comprising:
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a substrate;
an anchor part fixedly disposed on the substrate;
a movable electrode disposed over the substrate and having a cylindrical movable electrode side face;
a beam connecting the anchor part and the movable electrode and elastically deformed to displace the movable electrode in a direction approximately parallel to a surface of the substrate by acceleration applied in the direction; and
a fixed electrode fixedly disposed on the substrate and having a cylindrical fixed electrode side face that makes a specific interval with the movable electrode side face when no acceleration is applied to the movable electrode, wherein the acceleration is detected based on a change in interval between the movable electrode side face and the fixed electrode side face;
wherein a thickness of the movable electrode is thinner than that of the anchor part; and
wherein surfaces of the anchor part, the beam, and the movable electrode on an opposite side of the substrate are on a plane in a state where no gravitational force is applied to the movable electrode and the beam.
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Specification