Miniature combination valve and pressure transducer system
First Claim
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1. A transducer apparatus, comprising:
- a mechanical structure operable by a user, the mechanical structure comprising a valve core of a valve, the valve core comprising an elongate barrel having a through bore, a proximal end, and a distal end, and a valve cup in said barrel movable between a first, open position and a second, closed position closing said valve; and
a movable actuating pin extending through said barrel between said proximal and distal ends of said barrel and being coupled to said valve cup at said distal end of said barrel, said actuating pin having a proximal end protruding from said proximal end of said barrel, said movable actuating pin of said valve movable with respect to said barrel by a user engaging the proximal end of said actuating pin to move said valve cup to said open position, said actuating pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure.
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Abstract
A valve system includes a movable microelectromechanically structured (MEMS) pressure sensor that not only senses pressure but also functions as a mechanical actuator for the valve. An alternative valve system includes a MEMS pressure sensor that extends through an aperture in a curved wall, such as a curved wall of a valve body or a valve core, at an oblique angle to allow it be securely mounted in the confined space of an automotive-type tire inflation valve. The valve system includes a transmitter integrated with the valve and a receiver located at a remote location, such as the passenger compartment of an automobile.
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Citations
21 Claims
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1. A transducer apparatus, comprising:
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a mechanical structure operable by a user, the mechanical structure comprising a valve core of a valve, the valve core comprising an elongate barrel having a through bore, a proximal end, and a distal end, and a valve cup in said barrel movable between a first, open position and a second, closed position closing said valve; and
a movable actuating pin extending through said barrel between said proximal and distal ends of said barrel and being coupled to said valve cup at said distal end of said barrel, said actuating pin having a proximal end protruding from said proximal end of said barrel, said movable actuating pin of said valve movable with respect to said barrel by a user engaging the proximal end of said actuating pin to move said valve cup to said open position, said actuating pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure. - View Dependent Claims (3, 4)
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2. A transducer apparatus comprising:
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a mechanical structure operable by a user; and
a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure;
said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.
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5. A transducer apparatus comprising:
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a mechanical structure operable by a user;
a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure;
said MEMS further having formed on it a wireless transmission circuit for transmitting a wireless signal responsive to said pressure to a remote location; and
said transmission circuit comprising an antenna having a wavelength modulated in response to said pressure for transmitting passively.
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6. A transducer valve, comprising:
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a valve core mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior, the valve core being elongated and having a central longitudinal axis; and
a movable member comprising an actuator pin of elongated shape having a longitudinal axis disposed generally coaxially with the longitudinal axis of said valve core to extend through said valve core, said actuator pin selectively movable by a user engaging an end of said actuator pin protruding from said valve core between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said valve core to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said valve core to allow fluid flow through said passage, said actuator pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate. - View Dependent Claims (8, 11, 12, 13)
said MEMS further has formed on it a transmission circuit wirelessly transmitting a signal responsive to said pressure to a remote location; and
said valve core includes an antenna electronically coupled to said distal end of said MEMS and extending from said distal end of said valve core.
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7. A transducer valve, comprising:
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a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior;
a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and
said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.
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9. A transducer valve, comprising:
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a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior;
a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and
said MEMS further having formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location;
said transmission circuit transmitting wirelessly. - View Dependent Claims (10)
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14. A transducer apparatus, comprising:
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a structure having a curved wall with an aperture between opposing sides of said wall; and
a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate, said MEMS mounted to said structure and extending at least part way through said aperture at an oblique angle with respect a line parallel to a portion of said wall, said MEMS measuring pressure on one side of said wall with respect to pressure on an opposite side of said wall. - View Dependent Claims (15, 16, 17, 18)
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19. A transducer apparatus, comprising:
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a mechanical structure operable by a user; and
a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user engaging said movable member to actuate said mechanical structure, said movable member being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure.
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20. A transducer apparatus, comprising:
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a mechanical structure operable by a user; and
a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member transferring an actuating force between said member and said structure when operated by a user, said movable member being formed substantially entirely by a micromechanical structure (MEMS) having a transducer and transducer electronic circuitry integrally formed together on a semiconductor substrate.
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21. The transducer apparatus of claim 21, wherein;
said transducer comprises a pressure transducer.
Specification