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Method of fabricating electro-mechanical devices by multilayer deposition

  • US 6,200,508 B1
  • Filed: 10/27/1997
  • Issued: 03/13/2001
  • Est. Priority Date: 10/25/1996
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a three-dimensional, electromechanical component composed of a plurality of portions consisting of different materials, said method comprising the steps of:

  • preparing a substrate;

    selecting the materials so that the material from a first of said plurality of sources is an electrically non-conductive material and the material from a second plurality of sources is an electrically conductive material;

    movably mounting a plurality of material sources opposite the substrate so that material from each source may be directed toward the substrate;

    controllably activating while moving said first and second in at least two dimensions so that the materials from said sources are deposited in layers on the substrate to build up said portions on the substrate layer by layer, so that said non-conductive material is laid down to form a non-conductive portion and said conductive material is laid down to form a conductive portion electromechanically cooperative with the non-conductive portion, and continuing the activating while moving step until all of the layers of all of the materials collectively form the component, said materials being deposited by said sources being selected so that at least one of said plurality of portions is movable relatively.

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