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Removal of dielectric oxides

  • US 6,200,891 B1
  • Filed: 08/13/1998
  • Issued: 03/13/2001
  • Est. Priority Date: 08/13/1998
  • Status: Expired due to Fees
First Claim
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1. A method for removing exposed oxide from an article wherein said article contains at least one feature selected from the group consisting of (i) a metal or conductive metal-containing structure contacting said oxide, and (ii) a metal or conductive metal-containing structure having an exposed surface, which method comprises contacting said article with a liquid composition containing about 0.5 to about 15 molar of a fluoride-containing compound and an organic solvent wherein said organic solvent is selected from the group consisting of propylene carbonate, N-methyI pyrrolidone, gamma butyrolactone, methylene chloride benzyl alcohol, N-formyl morpholine, N-formyl piperidine, cyclohexanone, cyclopentanon, methyl benzoate, diglyme, 2-methyl tetrahydrofuran, methyl and ethyl esters of acid selected from the group consisting of phthalic acid, isophthalic acid and terephthalic acid, to thereby selectively remove at least a portion of said exposed oxide.

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