×

Torsional micro-mechanical mirror system

  • US 6,201,629 B1
  • Filed: 08/26/1998
  • Issued: 03/13/2001
  • Est. Priority Date: 08/27/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A torsional micro-mechanical mirror system comprising:

  • a base having a cavity formed therein;

    a mirror assembly;

    a torsional mirror support assembly comprising at least one torsional spring supporting the mirror assembly for rotational movement over and within the cavity, the cavity sized sufficiently to allow unimpeded rotation of the mirror assembly to a preselected maximum angle of deflection; and

    an actuator assembly operative to apply a driving force directly to the torsional mirror support assembly to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly.

View all claims
  • 9 Assignments
Timeline View
Assignment View
    ×
    ×