Particulate objects conveying apparatus for conveying particles of a predetermined size

• US 6,203,249 B1
• Filed: 09/29/1998
• Issued: 03/20/2001
• Est. Priority Date: 09/29/1998
• Status: Expired due to Fees

• Current Assignee: Mitsui High-Tec Incorporated
• Original Assignee: Mitsui High-Tec Incorporated
• Inventors: Higuchi, Akikazu, Ishida, Migaku
• Primary Examiner(s): Ellis, Christopher P.
• Assistant Examiner(s): RIDLEY, RICHARD W L
• Application Number:
  US09/162,160
• Time in Patent Office: 903 Days
• Field of Search: 406/85, 406/62, 406/63, 406/65, 406/66, 406/68, 406/52, 406/72, 406/73, 406/74, 406/88, 406/89, 406/90, 406/91, 406/92, 406/125, 221/203, 221/237, 221/278, 221/233
• US Class Current: 406/85
• CPC Class Codes: H01L 21/67721 the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames H01L21/6773 takes precedence
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices

Abstract

A particulate object conveying device is provided, and the conveying device includes a stagnating portion. A rotor has an outer circumference having a plurality of grooves formed equidistantly about the outer circumference, the grooves being of a size and shape to hold a single one of the particles of predetermined size. The rotor rotates within the stagnating portion. A discharge path is provided for discharging the particles from the rotor.

Claims

1. A particular object conveying device for conveying particles of a predetermined size, comprising:

a stagnating portion;

a disc-shaped rotor having an outer circumference with a plurality of grooves formed equidistantly about said outer circumference, said grooves being of a size and shape to hold only a single one of said particles of predetermined size, said rotor rotating about a rotary shaft within said stagnating portion;

a discharge path for discharging said particles from said rotor, wherein said stagnating portion has a gap and is disposed on a side of said rotor, said stagnating portion has a cross section defined substantially by two radial lines and an arcuate line to form a partial section of a circle, so that said grooves pass said stagnating portion when ascending, and excess particles taken up in movement of said rotor fall into said stagnating portion;

a tubular flow passage coupled to said discharge path;

a spiral stream device that allows a fluid to flow into said flow passage from a tangential direction to create a spiral stream of said fluid;

a supply pipe, connected to said discharge path, that receives one of said particles suspended in a first atmosphere;

a first section in which said one of said particles and said first atmosphere contact said spiral stream in proximity to an exit of said supply pipe such that said first atmosphere is separated from said one of said particles; and

a second section that suspends said one of said particles in a second atmosphere, and discharges said one of said particles and said second atmosphere.

2. The device of claim 1, where a depth of said groove is 0.5 to 1.5 times a diameter of said particles.

3. The device of claim 1, wherein said particles are polycrystalline silicon.

4. The device of claim 1, wherein said discharge path is disposed under said rotor, such that particles, one by one, fall from a corresponding one of said plurality of grooves into said discharge path as said corresponding one of said grooves rotates into a position just above said discharge path.

5. The device of claim 1, further comprising:

a storage section, disposed above said rotor, for storing particulate objects of polycrystalline silicon;

a supplying pipeline having an inner tapered surface, said pipeline connecting said storage section to said stagnating portion; and

a valve disposed in said pipeline closer to said storage section that said stagnating portion.

6. The device of claim 5, further comprising an accelerating device, operating cooperatively with said discharge path, to utilize fluid pressure to accelerate the movement of said particles through said discharge path.

7. The device of claim 1, wherein said first section further comprises:

an inner pipe connected to said supply pipe; and

a discharge chamber surrounding said inner pipe in which said spiral stream forms.

8. The device of claim 7, wherein said discharge chamber is a cylindrical pipe that surrounds said inner pipe, and has a plurality of discharge holes adjacent a downstream end of said cylindrical pipe.

9. The device of claim 8, wherein said discharge holes are positioned equidistantly at predetermined intervals about said cylindrical pipe.

10. The device of claim 9, wherein said first atmosphere and said fluid are gases.

11. The device of claim 9, further comprising a vacuum chamber surrounding said plurality of holes, said vacuum chamber comprising a vacuum pump.

12. The device of claim 7, wherein said inner pipe is porous, and has a diameter larger than said one of said particles.

13. The device of claim 7, wherein said inner pipe is made of mesh material.

17. The device of claim 1, further comprising a filter that filters said particles of predetermined size from objects of variable sizes.

14. A particulate object conveying device for conveying particles of a predetermined size, comprising:

a stagnating portion;

a rotor having an outer circumference having a plurality of grooves formed equidistantly about said outer circumference, said rotor rotating within said stagnating portion;

a discharge path for discharging said particles from said rotor;

a tubular flow passage coupled to said discharge path;

a spiral stream device that allows a fluid to flow into said flow passage from a tangential direction to create a spiral stream of said fluid;

a supply pipe, connected to said discharge path, that receives one of said particles suspended in a first atmosphere;

a first section in which said one of said particles and said first atmosphere contact said spiral stream in proximity to an exit of said supply pipe such that said first atmosphere is separated from said one of said particles, said first section including an inner pipe connected to said supply pipe, and a discharge chamber surrounding said inner pipe in which said spiral stream forms;

a second section that suspends said one of said particles in a second atmosphere, and discharges said one of said particles and said second atmosphere;

said discharge chamber being a cylindrical pipe that surrounds said inner pipe, and has at plurality of discharge holes adjacent a downstream end of said cylindrical pipe, said discharge holes being positioned equidistantly at predetermined intervals about said cylindrical pipe; and

a vacuum chamber surrounding said plurality of holes, said vacuum chamber comprising a vacuum pump.

15. A particulate object conveying device for conveying particles of a predetermined size, comprising:

a stagnating portion;

a rotor having an outer circumference having a plurality of grooves formed equidistantly about said outer circumference, said grooves being of a size and shape to hold a single one of said particles of predetermined size, said rotor rotating within said stagnating portion;

a discharge path for discharging said particles from said rotor;

a tubular flow passage coupled to said discharge path;

a spiral stream device that allows a fluid to flow into said flow passage from a tangential direction to create a spiral stream of said fluid;

a supply pipe, connected to said discharge path, that receives one of said particles suspended in a first atmosphere;

a first section in which the one of said particles and said first atmosphere contact said spiral stream in proximity to an exit of said supply pipe such that said first atmosphere is separated from said one of said particles, said first section including an inner pipe connected to said supply pipe, and a discharge chamber surrounding said inner pipe in which said spiral stream forms;

a second section that surrounds said one of said particles in a second atmosphere, and discharges said one of said particles and said second atmosphere;

said discharge chamber being a cylindrical pipe that surrounds said inner pipe, and has a plurality of discharge holes adjacent a downstream end of said cylindrical pipe.

16. The device of claim 15, wherein said discharge holes are positioned equidistantly at predetermined intervals about said discharge pipe.