Control system for oscillating optical element in scanners
First Claim
Patent Images
1. A light beam scanner for directing a light beam used to traverse a symbol to be read comprising:
- a light source;
a mirror for reflecting light from the light source, a drive electrode for applying electrostatic force to the mirror to vary its position so that the direction of reflected light is varied;
a pick-up electrode for sensing the position of the mirror; and
feedback circuitry for modifying the applied electrostatic force in response to the sensed mirror position, wherein the electrostatic force is periodically applied to the mirror by imposing a periodic voltage on the drive electrode and wherein the position of the mirror is sensed by detecting variations in the capacitance between the mirror and the pick-up electrode, and wherein a carrier signal is applied to the mirror and a voltage is induced on the pick-up electrode, which induced voltage corresponds to the carrier signal, amplitude modulated in response to changes in distance between the mirror and the pick-up electrode.
7 Assignments
0 Petitions
Accused Products
Abstract
A miniature light beam scanner includes a moving optical element formed on a substrate with electrodes for driving the optical element and sensing its motion as indicated by a varying capacitance between the optical element and the substrate. Control and driver circuitry responsive to the variation in capacitance drives the optical element to move at a resonant frequency and predetermined amplitude.
49 Citations
30 Claims
-
1. A light beam scanner for directing a light beam used to traverse a symbol to be read comprising:
-
a light source;
a mirror for reflecting light from the light source, a drive electrode for applying electrostatic force to the mirror to vary its position so that the direction of reflected light is varied;
a pick-up electrode for sensing the position of the mirror; and
feedback circuitry for modifying the applied electrostatic force in response to the sensed mirror position, wherein the electrostatic force is periodically applied to the mirror by imposing a periodic voltage on the drive electrode and wherein the position of the mirror is sensed by detecting variations in the capacitance between the mirror and the pick-up electrode, and wherein a carrier signal is applied to the mirror and a voltage is induced on the pick-up electrode, which induced voltage corresponds to the carrier signal, amplitude modulated in response to changes in distance between the mirror and the pick-up electrode. - View Dependent Claims (2, 3, 4, 5)
generator circuitry for providing the carrier signal; - and
generator circuitry for providing the periodic voltage imposed on the drive electrode; and
wherein the feedback circuitry controls at least one of the frequency and amplitude of the periodic driving voltage in response to detected variations in capacitance between the mirror and the pick-up electrode.
-
-
4. The light beam scanner of claim 1, wherein the mirror is pivotably mounted on the substrate by at least one grounded conductive member.
-
5. The light beam scanner of claim 1, wherein the mirror is suspended on the substrate by conductive members defining a pivoting axis of the mirror.
-
6. A miniature light beam scanner formed on a semiconductor substrate for detecting optical properties of a scanned target comprising:
-
means for directing a light beam in a direction dictated by the position of said means;
means for applying a driving force to vary the position of said directing means and for electrically sensing the position of said directing means; and
means for modifying the driving force in response to the sensed position of said directing means to cause the light beam directing means to oscillate at a resonance frequency and predetermined amplitude, wherein the means for sensing the position of the directing means comprises one or more electrodes on the semiconductor substrate coupled by an electric field to the means for directing the light beam. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
-
-
14. A method for controlling a moving mirror which reflects a light beam in a light beam scanner comprising the steps of
applying a periodically varying electrostatic force to the mirror to vary its position; -
sensing the position of the mirror; and
modifying the applied electrostatic force in response to the sensed mirror position, wherein the position of the mirror is sensed by detecting variation in the capacitance between the mirror and a conductive pick-up pad located in proximity to the mirror. - View Dependent Claims (15, 16, 17, 18, 19, 20)
applying a carrier signal to the mirror; and
detecting an induced voltage on the pick-up pad which corresponds to the carrier signal, amplitude modulated in response to changing distance between the mirror and the pick-up pad.
-
-
18. The method of claim 14, wherein the mirror is driven to rotate about an axis by applying a periodically varying electrostatic force to the mirror.
-
19. The method of claim 18, wherein the mirror is a torsional oscillator driven by the electrostatic force near its resonant frequency.
-
20. The method of claim 19, wherein the mirror torsionally oscillates at a frequency below 100 Hz.
-
21. Electromechanical oscillator and control system for light scanning, comprising:
-
an optical element at least a portion of which is moveable in relation to a supporting substrate;
an electrically activated driver for applying a driving force to the optical element;
a sensor for sensing movement of the optical element;
feedback circuitry for varying the applied driving force, wherein at least a portion of the optical element is driven to oscillate near a resonance frequency at a predetermined amplitude; and
electronic circuitry for imposing a carrier signal on the optical element, wherein the sensor includes at least one electrode in proximity of the optical element in which a voltage is induced corresponding to the carrier signal whose amplitude has been modulated by movement of the optical element. - View Dependent Claims (22, 23, 24, 25, 26)
an AM demodulator; and
a scan amplitude error detector for comparing an output signal from the AM demodulator with a reference to detect errors in the amplitude of oscillation of the optical element and for producing an amplitude control signal applied to the electrically activated driver.
-
-
26. The system of claim 21, wherein the optical element includes an integral reflector and detector for detecting light reflected from a bar code.
-
27. A control system for an oscillating optical element in light beam scanner, comprising:
-
an electrostatic driver for inducing oscillating motion of the optical element relative to a substrate on which the optical element is mounted;
a sensor on the substrate in which a varying voltage signal is induced containing information concerning the amplitude and phase of the movement of the optical element relative to the sensor; and
feedback circuitry for controlling the electrostatic driver responsive to said signal, to drive the optical element at a resonant frequency and predetermined amplitude. - View Dependent Claims (28, 29, 30)
-
Specification