Local interconnect etch characterization using AFM

• US 6,207,575 B1
• Filed: 02/20/1998
• Issued: 03/27/2001
• Est. Priority Date: 02/20/1998
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Sinjh, Bhanwar, Yang, Wenge
• Primary Examiner(s): Utech, Benjamin L.
• Assistant Examiner(s): CHEN, KIN CHAN
• Application Number:
  US09/027,047
• Time in Patent Office: 1,131 Days
• Field of Search: 438/689, 438/706, 438/723, 438/724, 364/490, 364/468
• US Class Current: 438/706
• CPC Class Codes: H01L 21/76895 Local interconnects; Local pads, as exemplified by patent document EP0896365
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y10S 977/854 Semiconductor sample

Abstract

In one embodiment, the present invention relates to a method of processing a wafer including characterizing a local interconnect etch, involving the steps of etching a portion a wafer comprising at least one device thereon to form a local interconnect etched portion on the wafer, scanning the local interconnect etched portion of the wafer with an atomic force microscope having a flared probing tip, generating surface profile data of the local interconnect etched portion from the atomic force microscope, and characterizing the surface profile data. In another embodiment, the present invention relates to a method of determining whether or not a trenching phenomenon exists after performing a local interconnect etch, involving the steps of scanning a local interconnect etched portion of a wafer with an atomic force microscope having a flared probing tip, generating surface profile data of the local interconnect etched portion from the atomic force microscope, and assessing whether the surface profile data indicates that the trenching phenomenon exists within the local interconnect etched portion.

Claims

1. A method of processing a wafer including characterizing a local interconnect etch as acceptable or unacceptable, comprising:

etching a portion of a wafer comprising at least one device thereon to form a local interconnect etched portion on the wafer;

scanning the local interconnect etched portion of the wafer with an atomic force microscope;

generating surface profile data including sidewall profile data of the local interconnect etched portion from the atomic force microscope;

evaluating the surface profile data to determine whether the surface profile data indicates the presence of a trenching phenomenon and etching through an etch stop layer; and

further processing of the wafer if both the trenching phenomenon and the etching through an etch stop layer are not present or reprocessing or discarding the wafer if either the trenching phenomenon or the etching through an etch stop layer are present.

2. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, further comprising forming a local interconnect in the local interconnect etched portion.

3. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 2, wherein the local interconnect is an electrical connection between a source/drain region and a poly gate of the device.

4. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, further comprising discarding the wafer.

5. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, further comprising re-etching the local interconnect etched portion the wafer.

6. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein the local interconnect etched portion is at least one of a contact hole and a recess line.

7. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein the device is a field effect transistor device.

8. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein characterizing the surface profile data comprises at least one of:

determining whether or not a trenching phenomenon exists; and

calculating corner selectivity.

9. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein the etching step is an oxide etching step.

10. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein the etching step is a nitride etching step.

11. The method of processing a semiconductor including characterizing a local interconnect etch according to claim 1, wherein the atomic force microscope employs a probing tip having a flared end.

12. A method of determining presence of a trenching phenomenon after performing a local interconnect etch, comprising:

scanning a local interconnect etched portion of a wafer with an atomic force microscope having a flared probing tip;

generating surface profile data including sidewall profile data of the local interconnect etched portion from the atomic force microscope; and

evaluating the generated surface profile data including sidewall profile data of the local interconnect etched portion to determine whether the surface profile data indicates the presence of the trenching phenomenon within the local interconnect etched portion, and

further processing the wafer if the trenching phenomenon is not present or reprocessing or discarding the wafer if the trenching phenomenon is present.

13. The method of determining whether or not a trenching phenomenon exists after performing a local interconnect etch according to claim 12, wherein the trenching phenomenon exists between an oxide spacer and a poly gate of a field effect transistor.

14. The method of determining whether or not a trenching phenomenon exists after performing a local interconnect etch according to claim 12, wherein the local interconnect etched portion is at least one of a contact hole and a recess line.

15. The method of determining whether or not a trenching phenomenon exists after performing a local interconnect etch according to claim 12, wherein the local interconnect etched portion is formed by an oxide etching step.

16. The method of determining whether or not a trenching phenomenon exists after performing a local interconnect etch according to claim 12, wherein the local interconnect etched portion is formed by a nitride etching step.

17. A method of determining a value of poly gate corner selectivity after performing a local interconnect oxide etch and nitride etch on a wafer, comprising:

scanning a local interconnect etched portion of the wafer with an atomic force microscope having a flared probing tip;

generating surface profile data including sidewall profile data of the local interconnect etched portion from the atomic force microscope;

calculating the value of corner selectivity S based on equations $S=\frac{T_{\mathrm{ox}}-T_1}{N_{\mathrm{loss}}}$

 

wherein

18. The method of determining a value of poly gate corner selectivity after performing a local interconnect oxide etch and nitride etch on a wafer according to claim 17, wherein local interconnect etched portion of the wafer is adjacent a field effect transistor.

19. The method of determining a value of poly gate corner selectivity after performing a local interconnect oxide etch and nitride etch on a wafer according to claim 17, wherein the local interconnect etched portion is at least one of a contact hole and a recess line.