High temperature ZrN and HfN IR scene projector pixels
First Claim
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1. A method of producing an element of an ohmic heating array comprising:
- a) applying a resistive member over a thermally isolating member, said resistive member being comprised of nitrides of Group IV B Transition Metals of the periodic table having 40 or more valence electrons, said resistive member being sputtered onto said thermally isolating member in the presence of nitrogen gas and an inert carrier gas, where the ratio of carrier gas to nitrogen gas is approximately ten to one; and
b) annealing said resistive member by heating through a desired operating range of said element to a temperature above about 1000 K so that the final resistance of said resistive member exceeds about 50 ohms per square.
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Abstract
A structure and method of making resistive emitting members which exhibit high resistivity while at the same time providing high temperature operation significantly above that known in the art. Specifically the use of nitrides of Group IVB transition metals from the periodic table, exclusive of titanium is described.
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Citations
4 Claims
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1. A method of producing an element of an ohmic heating array comprising:
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a) applying a resistive member over a thermally isolating member, said resistive member being comprised of nitrides of Group IV B Transition Metals of the periodic table having 40 or more valence electrons, said resistive member being sputtered onto said thermally isolating member in the presence of nitrogen gas and an inert carrier gas, where the ratio of carrier gas to nitrogen gas is approximately ten to one; and
b) annealing said resistive member by heating through a desired operating range of said element to a temperature above about 1000 K so that the final resistance of said resistive member exceeds about 50 ohms per square. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeHoneywell Incorporated (Honeywell International Inc.)
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Original AssigneeHoneywell International Inc.
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InventorsGreenlaw, David K., Cole, Barrett E., Holmen, James O.
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Primary Examiner(s)WYSZOMIERSKI, GEORGE P
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Application NumberUS09/106,604Time in Patent Office1,009 DaysField of Search148/220, 148/237, 148/537, 204/192.17, 204/192.21US Class Current148/237CPC Class CodesB41J 2/33515 Heater layersB41J 2/3355 characterised by materialsB41J 2/3356 Corner type resistorsB41J 2/33565 Edge type resistorsB41J 2/3357 Surface type resistors
