Thin film structure machining and attachment
First Claim
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1. A method for fabrication of thin film structures, comprising:
- sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;
machining the thin film and the first layer to define a thin film structure;
separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; and
attaching the thin film structure on the substantially rigid second layer to a target substrate.
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Abstract
Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the sandwiching layers by adhesive attachment to a target substrate.
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Citations
12 Claims
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1. A method for fabrication of thin film structures, comprising:
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sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;
machining the thin film and the first layer to define a thin film structure;
separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; and
attaching the thin film structure on the substantially rigid second layer to a target substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for batch fabrication of thin film structures, the method comprising the steps of
sandwiching a thin film between first and second polymeric membranes machining the thin film to define an array of structures having a positive ground and a negative ground, peeling away the first polymeric membrane, separating one of the positive ground and the negative ground array of structures from the second polymeric membrane, applying an adhesive to selected areas of the target substrate, attaching the array of structures affixed to the second polymeric membrane to a target substrate after the step of applying an adhesive.
Specification