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Thin film structure machining and attachment

  • US 6,210,514 B1
  • Filed: 02/11/1998
  • Issued: 04/03/2001
  • Est. Priority Date: 02/11/1998
  • Status: Expired due to Term
First Claim
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1. A method for fabrication of thin film structures, comprising:

  • sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;

    machining the thin film and the first layer to define a thin film structure;

    separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; and

    attaching the thin film structure on the substantially rigid second layer to a target substrate.

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