Thin film structure machining and attachment

• US 6,210,514 B1
• Filed: 02/11/1998
• Issued: 04/03/2001
• Est. Priority Date: 02/11/1998
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Lau, Rachel King-Ha, Berlin, Andrew A., Biegelsen, David K., Cheung, Patrick C. P., Yim, Mark H.
• Primary Examiner(s): MAYES, MELVIN C
• Application Number:
  US09/022,173
• Time in Patent Office: 1,147 Days
• Field of Search: 156/230, 156/233, 156/239, 156/241, 156/247, 156/248, 156/249, 156/256, 156/250, 156/267
• US Class Current: 156/241
• CPC Class Codes: B26D 7/08 Means for treating work or cutting member to facilitate cutting tensioning band cutters B26D1/48
• CPC Class Codes: Y10T 156/1052 with cutting, punching, tearing or severing
• CPC Class Codes: Y10T 156/1062 Prior to assembly
• CPC Class Codes: Y10T 156/108 Flash, trim or excess removal

Abstract

Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the sandwiching layers by adhesive attachment to a target substrate.

Claims

1. A method for fabrication of thin film structures, comprising:

sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;

machining the thin film and the first layer to define a thin film structure;

separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; and

attaching the thin film structure on the substantially rigid second layer to a target substrate.

2. The method of claim 1, wherein the machining step is at least one of optically cutting the thin film with a infrared, optical or ultraviolet laser, stamp cutting, shearing, punching, blanking, polishing, hammering, coining, flanging, and high pressure fluid cutting.

3. The method of claim 1 wherein the second layer is substantially transparent.

4. The method of claim 1, wherein the separating step is at least one of mechanically peeling, lifting, washing and chemically etching the first layer from the defined thin film structure.

5. The method of claim 1, wherein the first layer and the elastomeric layer of the second layer have different tack to the thin film.

6. The method of claim 1, wherein at least one of the first layer and the elastomeric layer of the second layer is at least one of a cross linked polymeric membrane, a gel polymeric membrane, a polysiloxane, a polyurethane, a styrene, an olefinic, a copolyester, a polyamide, an elastomer and a melt processible rubber.

7. A method for batch fabrication of thin film structures, the method comprising the steps of

sandwiching a thin film between first and second polymeric membranes

machining the thin film to define an array of structures having a positive ground and a negative ground,

peeling away the first polymeric membrane,

separating one of the positive ground and the negative ground array of structures from the second polymeric membrane,

applying an adhesive to selected areas of the target substrate,

attaching the array of structures affixed to the second polymeric membrane to a target substrate after the step of applying an adhesive.

8. The method of claim 7, wherein second polymeric membrane is substantially transparent.

9. The method of claim 8, further comprising the step of optically aligning the array of structures affixed to the substantially transparent second polymeric membrane with the target substrate.

10. The method of claim 7, wherein the second polymeric membrane is an elastomer.

11. The method of claim 7, wherein the second polymeric membrane is a polysiloxane.

12. The method of claim 7, wherein the adhesive is a thermoplastic.