×

Magnetic film forming method

  • US 6,210,544 B1
  • Filed: 02/01/2000
  • Issued: 04/03/2001
  • Est. Priority Date: 03/08/1999
  • Status: Expired due to Fees
First Claim
Patent Images

1. A magnetic film forming method, comprising:

  • a step of preparing a material A formed of oxide of an element T of at least one kind of Fe, Co, and Ni, a material B formed of oxide of an element M of at least one kind selected from Ti, Zr, Hf, Nb, Ta, Cr, Mo, Si, P, C, W, B, Al, Ga, Ge, and rare earth elements and a material C formed of an element S of at least one kind of Fe, Co, and Ni;

    a target making step of making a target by sintering the powders of the material A, the material B and the material C;

    a disposing step of disposing the target in a film forming apparatus so that the target confronts a substrate; and

    a film forming step of forming a magnetic film on the substrate.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×