Optical cross point switch using deformable micromirror

• US 6,212,309 B1
• Filed: 01/21/1999
• Issued: 04/03/2001
• Est. Priority Date: 01/24/1998
• Status: Expired due to Fees

• Current Assignee: Zarlink Semiconductor Inc. (Microchip Technology Incorporated)
• Original Assignee: Zarlink Semiconductor Inc. (Microchip Technology Incorporated)
• Inventors: Nguyen, Tam, Skubnic, Milan, Miller, John
• Primary Examiner(s): Ngo, Hung N.
• Application Number:
  US09/234,306
• Time in Patent Office: 803 Days
• Field of Search: 385/16-21
• US Class Current: 385/17
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/0024 using space switching
• CPC Class Codes: H04Q 2011/0026 using free space propagation (e.g. lenses, mirrors)
• CPC Class Codes: H04Q 2011/0058 Crossbar; Matrix

Abstract

A photonic switching device has a first set of optical waveguides, a second set of optical waveguides, and an arrangement of controllable deformable micromirrors for selectively completing an optical path between any one of the first set of waveguides and any one of the second set of waveguides. Typically, the deformable mirrors are arranged in a pair of opposed grid arrays with the input and output waveguides extending along respective rows and columns in the manner of a crosspoint switch, but with the rows and columns intersecting at an oblique angle.

Claims

1. A photonic switching device comprising a first set of optical waveguides, a second set of optical waveguides, first and second opposed arrays of controllable deformable micromirrors associated respectively with said first and second sets of optical waveguides, at least one of said arrays being arranged in rows and columns, and said pairs of micromirrors being selectively tiltable, one from each array, to complete an optical path from any one of said first set of optical waveguides to any selected one of said second set of optical waveguides via a said pair of micromirrors.

2. A photonic switching device as claimed in claim 1, wherein said first and second arrays are arranged in rows and columns, the angle to which said mirrors can be tilted being preset to complete an optical path via predetermined pairs of said mirrors, and said first and second arrays thereby forming a non-blocking optical crosspoint switch.

3. A photonic switching device as claimed in claim 2, wherein said micromirrors in said arrays are arranged in a non-rectangular grid, the tilt axes of said micromirrors being set at an angle to the rows such that the beams reflected from the tilted micromirrors lie in a plane parallel to the plane of the array and extend along said rows of micromirrors.

4. A photonic switching device as claimed in claim 3, wherein said arrays form a rhombic grid, said arrays being laterally offset in the transverse and longitudinal directions.

5. A photonic switching device as claimed in claim 4, wherein said arrays are substantially identical.

6. A photonic switching device as claimed in claim 3, wherein said sets of optical waveguides are curved to lead light signals between said rows and input and output optic fibers.

7. A photonic switching device as claimed in claim 2, wherein the crosspoint switch formed by said opposing arrays is bi-directional.

8. A photonic switching device as claimed in claim 1, wherein said first and second waveguides are formed in respective substrates supporting said micromirror arrays.

9. A photonic switching device as claimed in claim 1, wherein said waveguides are coupled to incoming and outgoing optical fibers.

10. A photonic switching device as claimed in claim 1, wherein said micromirrors include raised reflective facets an their surface to increase the deflection angle of an incident ray.

11. A photonic switching device as claimed in claim 10, wherein said raised facets form deflect incident light through interference effects.

20. A photonic switching device as claimed in claim 1, wherein said micromirrors are tiltable through an angle of about 10°

to 15°

.

21. A photonic switching device as claimed in claim 20, wherein the axes of the mirrors are rotationally offset to the paths of the respective rows and columns by about 44°

.

12. A method of switching optical signals between a first set of optical waveguides and a second set of optical waveguides, comprising deploying first and second opposed arrays of controllable deformable micromirrors between said first and second set of waveguides, at least one of the arrays being arranged in rows and columns, and controlling pairs of said micromirrors, one from each array, to selectively complete an optical path between any one of said first set of waveguides and any selected one of said second set of waveguides via a said pair of said micromirrors.

13. A method as claimed in claim 12, wherein the arrangement of deformable micromirrors comprises first and second opposed arrays of controllable deformable micromirrors arranged in rows and columns, said first set of optical waveguides associated with the rows of one of said arrays, and said second set of optical waveguides associated with the rows of the other of said arrays, and wherein selected micromirrors from each of said arrays can be tilted to complete an optical path from any one of said first set of optical waveguides to any selected one of said second set of optical waveguides, said first and second arrays thereby forming an optical crosspoint switch.

14. A method as claimed in claim 13, wherein the rows and columns of at least one of said arrays are arranged in a non-rectangular grid, with the hinge axis of the micromirrors being rotationally offset to the rows by an angle selected to ensure that the reflected beam lies in a plane parallel to the plane of the array.

15. A method as claimed in claim 14, wherein the arrays are rhombic.

16. A method as claimed in claim 15, wherein the arrays are substantially identical.

17. A method as claimed in claim 15, wherein the arrays are laterally offset in transverse and longitudinal directions, said arrays being formed on substrates having micromachined locating means formed thereon.

18. A method as claimed in claim 15, wherein said micromachined locating means comprise pins and holes.

19. A method as claimed in claim 15, wherein said micromachined locating means comprise grooves and ridges.

22. A method as claimed in claim 12, wherein said micromirrors are tiltable through an angle of about 10°

to 15°

.

23. A method as claimed in claim 22, wherein the axes of the mirrors are rotationally offset to the paths of the respective rows and columns by about 44°

.