Multiple optical channels for chemical analysis

• US 6,214,246 B1
• Filed: 07/21/1997
• Issued: 04/10/2001
• Est. Priority Date: 04/17/1996
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Craighead, Harold G.
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): Ahmed, Shamim
• Application Number:
  US08/897,442
• Time in Patent Office: 1,359 Days
• Field of Search: 216/56, 216/94, 216/24, 216/44, 356/344, 204/192.34
• US Class Current: 216/56
• CPC Class Codes: G01N 21/01 Arrangements or apparatus for facilitating the optical investigation

Abstract

Apparatus for optical analysis of a sample material includes a channel block incorporating microfabricated channels and an integral gel material. Illuminating optics direct light to the sample material and light reflected from, refracted by and/or emitted by the sample is collected by collection optics for detection. The gel material is formed within the channels and includes multiple closely spaced pillars to form a porous separator for sample material to be analyzed.

Claims

1. A method of fabricating a micron-scale artificial gel, comprising:

defining on a substrate an etch mask defining the locations and cross-sectional shapes of an array of pillars; and

etching said substrate through said mask to fabricate a multiplicity of pillars in an array, the pillars having cross-sectional shapes and dimensions on the order of 20 nm, and being spaced from adjacent pillars by distances determined by said etch mask to define a porous artificial gel for separating sample material which passes through said array of pillars.

3. The method of claim 1, wherein the step of defining said etch mask includes depositing a thin film on a non-wetting surface of said substrate to produce beading in said thin film to define isolated mask islands on said surface.

2. The method of claim wherein 1, wherein the step of defining said etch mask includes lithographically defining an array of pillars in an elongated channel, with a range of sizes and spacings to vary the density of the artificial gel material along the length of the channel.

4. The method of claim 2, wherein said etching is reactive ion etching of said substrate around said islands to form said multiplicity of corresponding pillars.

5. A method of fabricating a micron-scale artificial gel, comprising:

defining on a substrate an etch mask defining the locations and cross-sectional shapes of an array of pillars;

etching said substrate through said mask to fabricate a multiplicity of pillars having cross-sectional dimensions on the order of 20 nm, and being spaced from adjacent pillars by distances determined by said etch mask;

locating said substrate and etched pillars in a mold to form a die; and

fabricating from said die mold a channel block containing gel columns corresponding to the spaces between said pillars.

15. The method of claim 5, wherein the step of defining said etch mask includes patterning said cross-sectional shapes of said pillars in said mask.

16. The method of claim 15, further including lithographically defining in said etch mask an elongated channel containing the location of said array.

17. The method of claim 16, wherein etching said substrate through said mask forms a channel in said substrate and forms upstanding pillars in said channel.

18. The method of claim 17, wherein the step of defining the locations of said array of pillars includes producing an etch mask pattern defining an array of pillars having a range of sizes and spacings which varies along the length of said elongated channels to thereby vary the density of said upstanding pillars in said channel.

19. The method of claim 5, wherein the step of defining said etch mask includes depositing a thin film on a non-wetting surface of said substrate to produce beading in said thin film to define isolated mask islands on said surface.

6. A method of fabricating a micron-scale artificial gel, comprising:

defining in an etch mask carried by a substrate at least one elongated channel;

defining within the elongated channel the locations and cross-sectional shapes of at least one array of pillars;

etching said substrate through said mask to fabricate a channel containing an array of a multiplicity of upstanding, generally parallel, spaced pillars having cross-sectional dimensions on the order of 20 nm, each pillar being spaced from adjacent pillars to define a porous artificial gel for separating sample material which passes along the elongated channel.

7. The method of claim 6, further including placing said substrate in a mold and replicating said channel and said array of pillars to produce duplicate sample channels containing artificial gel.

8. The method of claim 7, further including covering said sample channels.

9. The method of claim 6, wherein defining at least one channel includes lithographically defining a plurality of parallel channels each containing at least one array of pillars.

10. The method of claim 6, further including covering said at least one sample channel.

11. The method of claim 10, further including:

supplying to said at least one sample channel a sample material to be optically viewed; and

illuminating said channel through said substrate to view said sample material.

12. The method of claim 11, further including supplying an electric potential to sample material in said at least one sample channel to permit electrophoretic analysis of material passing through said gel.

13. The method of claim 6, wherein the step of defining said etch mask comprises depositing a thin film on a non-wetting surface of said substrate to produce beading in said thin film to define isolated mask islands on said surface.

14. The method of claim 6, wherein the step of defining said etch mask comprises lithographically defining an array of pillars having a range of sizes and spacings to vary the density of the artificial gel along at least a part of the length of the elongated channel.

20. A method of fabricating a micron-scale artificial gel in a channel comprising:

forming at least one elongated channel in a surface of a substrate;

simultaneously forming in said channel an array of generally parallel pillars having nanometer-scale cross-sectional dimensions, said pillars being generally parallel to each other and being spaced to define a porous artificial gel for separating sample material which passes along the elongated channel.

21. The method of claim 20, wherein the steps of forming said channel and forming said pillars are carried out simultaneously by etching said substrate through an etch mask on a surface of the substrate.

22. The method of claim 20, further including forming an etch mask on a surface of said substrate, and forming said channel and said pillars through said mask.

23. The method of claim 22, wherein forming an etch mask includes depositing a thin film on a non-wetting surface of said substrate to define the locations and cross-section dimensions and shapes of said pillars.

24. The method of claim 22, wherein forming an etch mask includes lithographically defining said channel and an array of pillars having a range of sizes and spacings to vary the density of the artificial gel along at least a part of the length of said channel.