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Method of forming a hybrid polymer film

  • US 6,214,422 B1
  • Filed: 10/08/1998
  • Issued: 04/10/2001
  • Est. Priority Date: 11/04/1994
  • Status: Expired due to Term
First Claim
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1. A method of forming a hybrid polymer film, the method comprising the steps of:

  • (a) cleaning and preparing a first surface of a substrate comprising a first polymer film by in-line plasma treatment under vacuum to form a first plasma-treated surface of the first polymer film; and

    (b) forming a second polymer film on the plasma-treated surface of the first polymer film by (1) in-line flash evaporation of at least one monomer under said vacuum, and (2) in-line radiation curing of said monomer under said vacuum to form said second polymer film.

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