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Method for patterning light emitting devices incorporating a movable mask

  • US 6,214,631 B1
  • Filed: 10/30/1998
  • Issued: 04/10/2001
  • Est. Priority Date: 10/30/1998
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a device, comprising the steps of:

  • (a) fabricating a standoff on a substrate;

    (b) positioning a shadow mask in a first position over the substrate by placing the shadow mask onto the standoff;

    (c) performing a first process on the substrate through the shadow mask;

    (d) after performing the first process, moving the shadow mask to a second position over the substrate, wherein the second position is measured relative to the first position; and

    (e) after moving the shadow mask to a second position, performing a second process on the substrate through the shadow mask;

    wherein a first charge is applied to the standoff and a second charge having a polarity opposite to that of the first charge is applied to the shadow mask, during a step selected from the group consisting of step (c) and step (e), to facilitate intimate contact between the standoff and the shadow mask during the selected step.

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